发明公开
EP1788401A1 Method and apparatus for testing electrical characteristics of object under test
有权
Verfahren und Vorrichtung zum Testen elektrischer Eigenschaften eines zuprüfendenObjekts
- 专利标题： Method and apparatus for testing electrical characteristics of object under test
- 专利标题（中）： Verfahren und Vorrichtung zum Testen elektrischer Eigenschaften eines zuprüfendenObjekts
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申请号： EP07004065.4申请日： 2004-06-08
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公开(公告)号： EP1788401A1公开(公告)日： 2007-05-23
- 发明人: Suga, Tadatomo , Itoh, Toshihiro , Komatsu, Shigekazu , Kataoka, Kenichi
- 申请人： TOKYO ELECTRON LIMITED , Suga, Tadatomo , Itoh, Toshihiro
- 申请人地址： 3-6 Akasaka 5-chome Minato-ku, Tokyo 107-8481 JP
- 专利权人： TOKYO ELECTRON LIMITED,Suga, Tadatomo,Itoh, Toshihiro
- 当前专利权人： TOKYO ELECTRON LIMITED,Suga, Tadatomo,Itoh, Toshihiro
- 当前专利权人地址： 3-6 Akasaka 5-chome Minato-ku, Tokyo 107-8481 JP
- 代理机构： Liesegang, Eva
- 优先权： JP2003164349 20030609
- 主分类号： G01R31/26
- IPC分类号： G01R31/26
摘要：
At least one third pair of electrode 17 formed on a mounting surface 11C of a stage 11 is in contact with a conductive layer Q formed on a first surface 31 of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.
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