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公开(公告)号：EP1182460B1
公开(公告)日：2005-11-09
申请号：EP01119644.1
申请日：2001-08-21
IPC分类号： G01R1/067
CPC分类号： G01R31/2891 , G01R1/067 , G01R1/06794 , G01R3/00 , G01R31/2886
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2.发明公开
公开(公告)号：EP1637893A1
公开(公告)日：2006-03-22
申请号：EP04745857.5
申请日：2004-06-08
发明人： SUGA, Tadatomo , ITOH, Toshihiro , KOMATSU, Shigekazu c/o Tokyo Electron Limited IPD , KATAOKA, Kenichi
IPC分类号： G01R31/26
CPC分类号： G01R1/07357 , G01R31/2887
摘要： At least one third pair of electrode 17 formed on a mounting surface 11C of a stage 11 is in contact with a conductive layer Q formed on a first surface 31 of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.
摘要翻译： 在载物台11的载置面11C上形成的至少三分之一的电极17与形成在检查对象物的第一面31上的导电层Q接触，通过烧结而在两者之间形成电路 现象。
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公开(公告)号：EP1182460A2
公开(公告)日：2002-02-27
申请号：EP01119644.1
申请日：2001-08-21
IPC分类号： G01R1/067
CPC分类号： G01R31/2891 , G01R1/067 , G01R1/06794 , G01R3/00 , G01R31/2886
摘要： Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe (12A) into electrical contact with an inspection electrode (P). An insulating film (O) formed on the surface of the inspection electrode (P) is broken by utilizing a fritting phenomenon so as to bring the inspection electrode (12A) into electrical contact with the inspection electrode (P).
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4.发明授权Method and apparatus for testing electrical characteristics of object under test 有权用于测试对象的电性质的方法和装置将被测试
公开(公告)号：EP1788401B1
公开(公告)日：2008-11-05
申请号：EP07004065.4
申请日：2004-06-08
发明人： Suga, Tadatomo , Itoh, Toshihiro , Komatsu, Shigekazu , Kataoka, Kenichi c/o Tokyo Electron AT Limited
IPC分类号： G01R31/26
CPC分类号： G01R1/07357 , G01R31/2887
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5.发明公开Method and apparatus for testing electrical characteristics of object under test 有权Verfahren und Vorrichtung zum Testen elektrischer Eigenschaften eines zuprüfendenObjekts
公开(公告)号：EP1788401A1
公开(公告)日：2007-05-23
申请号：EP07004065.4
申请日：2004-06-08
IPC分类号： G01R31/26
CPC分类号： G01R1/07357 , G01R31/2887
摘要： At least one third pair of electrode 17 formed on a mounting surface 11C of a stage 11 is in contact with a conductive layer Q formed on a first surface 31 of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.
摘要翻译： 形成在台架11的安装面11C上的至少一对第三对电极17与形成在检查对象的第一表面31上的导电层Q接触，并且通过使用烧结 现象。
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6.发明授权METHOD AND APPARATUS FOR TESTING ELECTRICAL CHARACTERISTICS OF OBJECT UNDER TEST 有权用于测试电性能点的方法和设备进行检查
公开(公告)号：EP1637893B1
公开(公告)日：2007-11-14
申请号：EP04745857.5
申请日：2004-06-08
发明人： SUGA, Tadatomo , ITOH, Toshihiro , KOMATSU, Shigekazu c/o Tokyo Electron Limited IPD , KATAOKA, Kenichi
IPC分类号： G01R31/26
CPC分类号： G01R1/07357 , G01R31/2887
摘要： At least one third electrode pair (17) formed on a supporting surface (11C) of a stage (11) is brought into contact with a conductive layer (Q) formed on a first surface (31) of an object under test, so that an electrical path is provided therebetween by utilizing fritting phenomenon.
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7.发明公开METHOD AND APPARATUS FOR TESTING ELECTRICAL CHARACTERISTICS OF OBJECT UNDER TEST 有权用于测试电性能点的方法和设备进行检查
公开(公告)号：EP1637893A4
公开(公告)日：2006-07-19
申请号：EP04745857
申请日：2004-06-08
CPC分类号： G01R1/07357 , G01R31/2887
摘要： At least one third electrode pair (17) formed on a supporting surface (11C) of a stage (11) is brought into contact with a conductive layer (Q) formed on a first surface (31) of an object under test, so that an electrical path is provided therebetween by utilizing fritting phenomenon.
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8.发明公开
公开(公告)号：EP1182460A3
公开(公告)日：2003-08-20
申请号：EP01119644.1
申请日：2001-08-21
IPC分类号： G01R1/067
CPC分类号： G01R31/2891 , G01R1/067 , G01R1/06794 , G01R3/00 , G01R31/2886
摘要： Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe (12A) into electrical contact with an inspection electrode (P). An insulating film (O) formed on the surface of the inspection electrode (P) is broken by utilizing a fritting phenomenon so as to bring the inspection electrode (12A) into electrical contact with the inspection electrode (P).
摘要翻译： 公开了一种通过使检查探针（12A）与检查电极（P）电接触来检查装置的电气特性的检查方法。 通过利用烧结现象使形成在检查电极（P）的表面上的绝缘膜（O）破裂，从而使检查电极（12A）与检查电极（P）电接触。
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