发明公开
- 专利标题: Two-axis scanner
- 专利标题(中): 两轴扫描系统
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申请号: EP06119972.5申请日: 2006-09-01
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公开(公告)号: EP1798585A3公开(公告)日: 2007-12-26
- 发明人: Kang, Seok-jin
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: 416 Maetan-Dong Yeongtong-Gu Suwon-si, Gyeonggi-Do KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: 416 Maetan-Dong Yeongtong-Gu Suwon-si, Gyeonggi-Do KR
- 代理机构: Zimmer, Franz-Josef
- 优先权: KR20050123985 20051215
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
Provided is a two-axis scanner. The two-axis scanner includes: a base; a stage disposed on the base; and a stage actuator that is disposed between the base and the stage and moves the stage along two axes. The stage actuator includes: a first stationary part having a predetermined shape; a horizontally movable frame surrounding the first stationary part, wherein a first horizontal deformable torsion spring is disposed between the first stationary part and the horizontally movable frame; a horizontal driver actuating the horizontally movable frame in a horizontal scanning direction; an auxiliary frame surrounding the horizontally movable frame, wherein a first vertical deformable torsion spring is disposed between the horizontally movable frame and the auxiliary frame; a vertically movable frame surrounding the auxiliary frame, wherein a second horizontal deformable torsion spring is disposed between the auxiliary frame and the vertically movable frame; a second stationary part at both sides of the vertically movable frame in a first direction, wherein a second vertical deformable torsion spring is disposed between the vertically movable frame and the second stationary part; and a vertical driver vertically actuating the vertically movable frame. The stage is disposed on the auxiliary frame.
公开/授权文献
- EP1798585A2 Two-axis scanner 公开/授权日:2007-06-20
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