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18 条记录 (耗时 0.012 秒)

    Rotary gyroscope
    2.
    发明公开
    Rotary gyroscope 审中-公开
    旋转，Gyroskop

    公开(公告)号：EP1455162A1

    公开(公告)日：2004-09-08

    申请号：EP04251299.6

    申请日：2004-03-05

    申请人： Samsung Electronics Co., Ltd.

    发明人： Jeong, Hee-moon ,  Kang, Seok-jin ,  Song, In-seob

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5642 ,  G01C19/02

    摘要： A rotary gyroscope (10) includes a base plate (1), an intermediate structure (3), including a driven element (33) floating over the base plate as supported by a driving supporter (34) radially extending therefrom, the driven element (33) performing an oscillating motion (63) with respect to a first axis (Z), which is vertical to a center plane thereof, a driving electrode (35) driving the driven element (33), and a sensing element (31) disposed in the driven element (33) and connected to the driven element (33) by a sensing connector (32) to oscillate together with the driven element (33) and concurrently to perform a sensing motion (62) with respect to a third axis (Y), which is vertical to the first axis (Z) and any second axis (X), which is parallel to a center plane, due to a Coriolis force when an angular velocity (61) is inputted from the second axis (X), and a cover (4) covering the intermediate structure (3) and having a sensing electrode (41) to detect the sensing motion (62) of the sensing element (31).

    摘要翻译： 旋转陀螺仪（10）包括基板（1），中间结构（3），其包括在由径向延伸的驱动支撑件（34）支撑的基板上浮动的从动元件（33），从动元件 33）相对于垂直于其中心平面的第一轴线（Z）执行振荡运动（63），驱动驱动元件（33）的驱动电极（35）和设置在所述驱动元件 在所述被驱动元件（33）中并通过感测连接器（32）与所述从动元件（33）连接以与所述从动元件（33）一起振荡并同时执行相对于第三轴线的感测运动（62） Y），当从第二轴（X）输入角速度（61）时，由于科里奥利力，它垂直于第一轴线（Z）和任何平行于中心平面的第二轴线（X） ，以及覆盖所述中间结构（3）并且具有感测电极（41）以检测所述感测运动（62）的盖（4） 的传感元件（31）。

    Mems gyroscope and fabrication method thereof
    3.
    发明公开
    Mems gyroscope and fabrication method thereof 审中-公开
    Mems-Kreisel und sein Herstellungsverfahren

    公开(公告)号：EP1434031A2

    公开(公告)日：2004-06-30

    申请号：EP03258036.7

    申请日：2003-12-19

    申请人： Samsung Electronics Co., Ltd.

    发明人： Kang, Seok-jin ,  Lee, Moon-chul ,  Chung, Seok-whan ,  Jung, Kyu-dong ,  Hong,, Seog-woo

    IPC分类号： G01C19/56 ,  G01P9/04

    CPC分类号： G01C19/5762 ,  B81B3/0059 ,  B81B2201/0242 ,  B81B2203/051 ,  B81B2203/053

    摘要： A vertical MEMS gyroscope operated by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to the upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate, a detection structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to the substrate, a cap wafer bonded with the substrate positioned above the driving structure and the detection structure, and a fixed vertical displacement detection electrode formed at a predetermined location of an underside of the cap wafer, for detecting displacement of the detection structure in the vertical direction.

    摘要翻译： 通过水平驱动操作的垂直MEMS陀螺仪包括：基板，固定在基板区域的上表面上的支撑层，浮动在基板上方的驱动结构，并且具有固定到支撑层上表面的部分和另一部分 与固定部分平行地，驱动结构具有能够在平行于基板的预定方向上振动的预定区域，在与驱动结构相同的平面上固定到驱动结构的检测结构，并且具有能够 相对于基板在垂直方向上振动，与位于驱动结构上方的基板接合的盖晶片和检测结构，以及形成在盖晶片的下侧的预定位置处的固定垂直位移检测电极，用于检测 检测结构在垂直方向的位移。

    Micro-electro mechanical system having single anchor
    4.
    发明公开
    Micro-electro mechanical system having single anchor 有权
    Elektromechanischer Microschalter mit einem einzelnen Anker

    公开(公告)号：EP1256970A1

    公开(公告)日：2002-11-13

    申请号：EP02253241.0

    申请日：2002-05-09

    申请人： SAMSUNG ELECTRONICS CO., LTD.

    发明人： Kang, Seok-jin ,  Cho, Jin-woo

    IPC分类号： H01H59/00

    CPC分类号： H01H59/0009 ,  H01H1/20

    摘要： A micro-electro mechanical system (MEMS) switch having a single anchor is provided. The MEMS switch includes a substrate (60); grounding lines installed on the substrate to be distant away from each other; signal transmission lines (44, 46) positioned at predetermined intervals between the grounding lines; an anchor (48) placed between the signal transmission lines; a driving electrode (54) that encircles the anchor while not being in contact with the anchor, the signal transmission lines and the grounding lines; and a moving plate (50) that is positioned on the driving electrode (54) to be overlapped with portions of the signal transmission lines (44, 46), and connected to the anchor (48) elastically.

    摘要翻译： 提供具有单个锚的微机电系统（MEMS）开关。 MEMS开关包括衬底（60）; 安装在基板上的接地线彼此远离; 位于接地线之间的预定间隔的信号传输线（44,46）; 放置在信号传输线之间的锚（48）; 驱动电极（54），其围绕所述锚固体而不与所述锚固体，所述信号传输线路和所述接地线路接触; 以及位于所述驱动电极（54）上以与所述信号传输线（44,46）的部分重叠并且弹性地连接到所述锚固件（48）的移动板（50）。

    Metal wiring method for an undercut
    8.
    发明公开
    Metal wiring method for an undercut 有权
    底切的金属接线方法

    公开(公告)号：EP1411025A2

    公开(公告)日：2004-04-21

    申请号：EP03256418.9

    申请日：2003-10-10

    申请人： Samsung Electronics Co., Ltd.

    发明人： Shong, Ci-moo ,  Chung, Seok-whan ,  Kang, Seok-jin ,  Lee, Moon-chul ,  Jung, Kyu-dong ,  Kim, Jong-seok ,  Jun, Chan-bong ,  Hong, Seog-woo ,  Kang, Jung-ho

    IPC分类号： B81C1/00 ,  B81B7/00

    CPC分类号： B81B7/0006 ,  H01L21/76877 ,  H01L23/5226 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A metal wiring method for an undercut in a MEMS packaging process includes disposing a MEMS element on a silicon substrate, welding a glass wafer to an upper portion of the silicon substrate having the MEMS element disposed thereon, the glass wafer having a hole formed therein for connecting a metal wiring, depositing a thin metal film for the metal wiring in the hole, and ion-milling the deposited thin metal film. By the ion-milling, the method is capable of connecting a metal wiring to a via hole having an undercut.

    摘要翻译： 在MEMS封装工艺中用于底切的金属布线方法包括：将MEMS元件设置在硅衬底上，将玻璃晶片焊接到其上设置有MEMS元件的硅衬底的上部，所述玻璃晶片具有形成在其中的孔，用于 连接金属布线，在该孔中沉积用于金属布线的薄金属膜，以及离子铣削沉积的薄金属膜。 通过离子铣削，该方法能够将金属布线连接到具有底切的通孔。

    Two-axis scanner
    9.
    发明公开
    Two-axis scanner 审中-公开
    两轴扫描系统

    公开(公告)号：EP1798585A3

    公开(公告)日：2007-12-26

    申请号：EP06119972.5

    申请日：2006-09-01

    申请人： Samsung Electronics Co., Ltd.

    发明人： Kang, Seok-jin

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0841

    摘要： Provided is a two-axis scanner. The two-axis scanner includes: a base; a stage disposed on the base; and a stage actuator that is disposed between the base and the stage and moves the stage along two axes. The stage actuator includes: a first stationary part having a predetermined shape; a horizontally movable frame surrounding the first stationary part, wherein a first horizontal deformable torsion spring is disposed between the first stationary part and the horizontally movable frame; a horizontal driver actuating the horizontally movable frame in a horizontal scanning direction; an auxiliary frame surrounding the horizontally movable frame, wherein a first vertical deformable torsion spring is disposed between the horizontally movable frame and the auxiliary frame; a vertically movable frame surrounding the auxiliary frame, wherein a second horizontal deformable torsion spring is disposed between the auxiliary frame and the vertically movable frame; a second stationary part at both sides of the vertically movable frame in a first direction, wherein a second vertical deformable torsion spring is disposed between the vertically movable frame and the second stationary part; and a vertical driver vertically actuating the vertically movable frame. The stage is disposed on the auxiliary frame.

    Two-axis scanner
    10.
    发明公开
    Two-axis scanner 审中-公开
    ZWEI-ACHSEN-Abtastsystem

    公开(公告)号：EP1798585A2

    公开(公告)日：2007-06-20

    申请号：EP06119972.5

    申请日：2006-09-01

    申请人： Samsung Electronics Co., Ltd.

    发明人： Kang, Seok-jin

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0841

    摘要： Provided is a two-axis scanner. The two-axis scanner includes: a base; a stage disposed on the base; and a stage actuator that is disposed between the base and the stage and moves the stage along two axes. The stage actuator includes: a first stationary part having a predetermined shape; a horizontally movable frame surrounding the first stationary part, wherein a first horizontal deformable torsion spring is disposed between the first stationary part and the horizontally movable frame; a horizontal driver actuating the horizontally movable frame in a horizontal scanning direction; an auxiliary frame surrounding the horizontally movable frame, wherein a first vertical deformable torsion spring is disposed between the horizontally movable frame and the auxiliary frame; a vertically movable frame surrounding the auxiliary frame, wherein a second horizontal deformable torsion spring is disposed between the auxiliary frame and the vertically movable frame; a second stationary part at both sides of the vertically movable frame in a first direction, wherein a second vertical deformable torsion spring is disposed between the vertically movable frame and the second stationary part; and a vertical driver vertically actuating the vertically movable frame. The stage is disposed on the auxiliary frame.

    摘要翻译： 提供了一个双轴扫描仪。 双轴扫描仪包括：基座; 设在基座上的舞台; 以及台架致动器，其设置在基座和台架之间并且沿两个轴线移动台架。 舞台致动器包括：具有预定形状的第一静止部分; 围绕所述第一固定部分的可水平移动的框架，其中第一水平可变形扭转弹簧设置在所述第一固定部分和所述水平移动的框架之间; 水平驱动器，其在水平扫描方向上致动水平移动的框架; 围绕所述水平移动框架的辅助框架，其中在所述水平移动框架和所述辅助框架之间设置有第一竖直可变形扭转弹簧; 围绕所述辅助框架的可垂直移动的框架，其中第二水平可变形扭转弹簧设置在所述辅助框架和所述可垂直移动的框架之间; 在所述可垂直移动的框架的第二方向的两侧的第二固定部分，其中第二垂直可变形扭转弹簧设置在所述可垂直移动的框架和所述第二固定部分之间; 以及垂直驱动垂直移动的框架的垂直驱动器。 舞台设置在辅助框架上。