发明授权
- 专利标题: Microelectromechanical inertial sensor, in particular for free-fall detection applications
- 专利标题(中): 微机电惯性传感器,尤其是用于自由落体应用
-
申请号: EP06425485.7申请日: 2006-07-14
-
公开(公告)号: EP1879034B1公开(公告)日: 2009-11-18
- 发明人: Merassi, Angelo , Zerbini, Sarah , Lasalandra, Ernesto , Vigna, Benedetto
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: Via C. Olivetti, 2 20041 Agrate Brianza (Milano) IT
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: Via C. Olivetti, 2 20041 Agrate Brianza (Milano) IT
- 代理机构: Cerbaro, Elena
- 主分类号: G01P15/08
- IPC分类号: G01P15/08 ; G01P15/125 ; G11B19/04
摘要:
Described herein is an inertial sensor (1) provided with a detection structure (9, 19) sensitive to a first, a second and a third component of acceleration (a x , a y , a z ) along respective directions of detection (x, y, z), and generating respective electrical quantities as a function of said components of acceleration. The detection structure (9, 19) supplies at output a resultant electrical quantity (C) obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration (a) acting on the inertial sensor (1), given by a vector sum of the components of acceleration (a x , a y , a z ) . In particular, the detection structure (9, 19) is of a microelectromechanical type, and comprises a mobile portion (2, 12) made of semiconductor material forming with a fixed portion (8, 18) a first, a second and a third detection capacitor, and an electrical-interconnection portion (10, 20), connecting the detection capacitors in parallel; the resultant electrical quantity (C) being the capacitance obtained from said connection in parallel.
公开/授权文献
信息查询
IPC分类: