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    Vertical movement microelectromechanical device with stopper structure
    1.
    发明公开
    Vertical movement microelectromechanical device with stopper structure 有权
    与垂直运动和止动结构的微电子机械设备

    公开(公告)号：EP1947053A3

    公开(公告)日：2010-03-10

    申请号：EP08150431.8

    申请日：2008-01-18

    申请人： STMicroelectronics S.r.l.

    发明人： Merassi, Angelo Antonio ,  Zerbini, Sarah ,  Simoni, Barbara

    IPC分类号： B81B3/00

    CPC分类号： B81B3/0051 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P2015/0831

    摘要： In a microelectromechanical device (1), a mobile mass (2) is suspended above a substrate (3) via elastic suspension elements (5), and is rotatable about said elastic suspension elements (5), a cover structure (10) is set above the mobile mass (2) and has an internal surface (10a) facing the mobile mass (2), and a stopper structure (12, 14) is arranged at the internal surface (10a) of the cover structure (10) and extends towards the mobile mass (2) in order to stop a movement of the mobile mass (10) away from the substrate (3) along an axis (z) transverse to the substrate (3). The stopper structure (12, 14) is arranged with respect to the mobile mass (2) so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass (2) about the elastic suspension elements (5).

    Micro-electromechanical structure with self-compensation of the termal drifts caused by thermomechanical stress
    2.
    发明公开
    Micro-electromechanical structure with self-compensation of the termal drifts caused by thermomechanical stress 有权
    微机电引起的热漂移的热机械应力的自补偿结构

    公开(公告)号：EP1640726A1

    公开(公告)日：2006-03-29

    申请号：EP04425705.3

    申请日：2004-09-22

    申请人： STMicroelectronics S.r.l.

    发明人： Merassi, Angelo ,  Zerbini, Sarah ,  Vigna, Benedetto

    IPC分类号： G01P15/125 ,  G01P15/18

    CPC分类号： G01P15/125 ,  G01P2015/082

    摘要： In a micro-electromechanical structure (1; 30; 60; 70) of semiconductor material, a detection structure (19; 31) is formed by a stator (5; 35; 61) and by a rotor (4; 34), which are mobile with respect to one another in presence of an external stress and are subject to thermal stress; a compensation structure (24; 46) of a micro-electromechanical type, subject to thermal stress and invariant with respect to the external stress, is connected to the detection structure (19; 31) thereby the micro-electromechanical structure (1; 30; 60; 70) supplies an output signal (ΔC, V OUT ) correlated to the external stress and compensated in temperature.

    摘要翻译： 在一个微机电结构（1; 30; 60; 70）的半导体材料，一检测结构（19; 31）和由一个转子（4; 34），其由定子（; 35 61 5）来形成 是可移动的相对于彼此在外部应力的存在，并有可能对热应力; 补偿结构（24; 46）的微机电型，受到热应力和不变相对于外部应力的，被连接到所述检测结构（19; 31），从而所述微机电结构（1; 30; 60; 70）提供给关联于外部压力和温度的补偿的输出信号（“C，V OUT）。

    Planar inertial sensor, in particular for portable devices having a stand-by function
    3.
    发明公开
    Planar inertial sensor, in particular for portable devices having a stand-by function 有权
    Planarer惯性传感器，无线电无线电

    公开(公告)号：EP1519197A1

    公开(公告)日：2005-03-30

    申请号：EP03425623.0

    申请日：2003-09-26

    申请人： STMicroelectronics S.r.l.

    发明人： Zerbini, Sarah ,  Merassi, Angelo ,  Lasalandra, Ernesto ,  Vigna, Benedetto

    IPC分类号： G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  H04M1/02

    CPC分类号： G01P15/0891 ,  G01P15/125 ,  G01P2015/0857 ,  H04M2250/12

    摘要： A planar inertial sensor (1), comprising a first region and a second region (3, 2) of semiconductor material, the second region (2) being capacitively coupled and being mobile with respect to the first region (3), which is fixed. The second region (2) extends in a plane and has second portions (4), which face respective first portions (11) of the first region (3) and are mobile with respect to these so as to modify the distance between them the second region (2) translate with respect to the first region (3) in any direction belonging to the plane of the second region (2).

    摘要翻译： 一种平面惯性传感器（1），包括半导体材料的第一区域和第二区域（3,2），所述第二区域（2）电容耦合并且相对于所述第一区域（3）是可移动的，所述第一区域固定 。 第二区域（2）在平面中延伸并且具有面对第一区域（3）的相应的第一部分（11）的第二部分（4）并且可相对于它们移动，以便改变它们之间的距离第二区域 区域（2）在属于第二区域（2）的平面的任何方向上相对于第一区域（3）平移。

    Microelectromechanical integrated sensor structure with rotary driving motion
    4.
    发明公开
    Microelectromechanical integrated sensor structure with rotary driving motion 有权
    传感器传感器

    公开(公告)号：EP1832841A1

    公开(公告)日：2007-09-12

    申请号：EP06425163.0

    申请日：2006-03-10

    申请人： STMicroelectronics S.r.l.

    发明人： Spinola Durante, Guido ,  Balzelli Ludovico, Alessandro ,  Zerbini, Sarah

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5712

    摘要： A driving mass (3) of an integrated microelectromechanical structure (1) is moved with a rotary motion about an axis of rotation (z), and a first sensing mass (16a) is connected to the driving mass (3) via elastic supporting elements (20) so as to perform a first detection movement in the presence or a first external stress. The driving mass (3) is anchored to an anchorage (7) arranged along the axis of rotation by elastic anchorage elements (8); an opening (9a) is provided within the driving mass, and the first sensing mass (16a) is arranged within the opening. The elastic supporting and anchorage elements render the first sensing mass (16a) fixed to the driving mass (3) in the rotary driving motion, and substantially decoupled from the driving mass in the detection movement.

    摘要翻译： 集成的微机电结构（1）的驱动块（3）以围绕旋转轴线（z）的旋转运动移动，并且第一感测质量块（16a）经由弹性支撑元件 （20），以便在存在或第一外部应力的情况下执行第一检测运动。 驱动质量块（3）被锚固到通过弹性锚固元件（8）沿旋转轴线布置的锚固件（7）; 在驱动质量块内设有开口（9a），第一传感块（16a）设置在开口内。 弹性支撑和锚固元件使得第一感测质量块（16a）在旋转驱动运动中固定到驱动质量块（3），并且在检测运动中基本上与驱动质量块分离。

    Micro-electromechanical structure, in particular accelerometer, with improved insensitivity to thermomechanical stresses
    5.
    发明公开
    Micro-electromechanical structure, in particular accelerometer, with improved insensitivity to thermomechanical stresses 有权
    一种微机电结构，特别是加速度传感器，具有改进的不敏感性热和机械应力

    公开(公告)号：EP1626283A1

    公开(公告)日：2006-02-15

    申请号：EP04425630.3

    申请日：2004-08-13

    申请人： STMicroelectronics S.r.l.

    发明人： Merassi, Angelo ,  Murari, Bruno ,  Zerbini, Sarah

    IPC分类号： G01P15/125 ,  G01P15/00 ,  B81B3/00

    CPC分类号： G01P15/125 ,  B81B7/0048 ,  B81B2201/0235 ,  G01P1/006 ,  G01P2015/082

    摘要： In a micro-electromechanical structure, in particular an accelerometer (1;30;60), a movable mass or rotor (4;34;61) has a centroidal axis (G;G') and includes a suspended structure (8;38;62) which carries mobile electrodes (10;40). A stator (5;35;77) carries fixed electrodes (12;42) facing the mobile electrodes. The suspended structure (4;34;61) is connected to a rotor-anchoring region (16;44) via elastic elements (15;45;65). The stator includes at least one stator element (20;55;67),which carries a plurality of fixed electrodes (12;42) and is fixed to a stator-anchoring region (21;54). One of the rotor-anchoring regions and stator-anchoring regions extends along the centroidal axis (G;G') which is an axis perpendicular to the plane of the structure, through its centre of gravity, and at least another of the rotor-anchoring regions and stator-anchoring regions extends in the proximity of the centroidal axis (G;G'). Due to the small distance of all anchoring regions to each other, and to the centre of gravity, stresses due to thermal mismatches can be reduced.

    摘要翻译： 在一个微机电结构，特别是加速计（1; 30; 60），可移动质量体或转子（4; 34; 61）具有一个形心轴（G; G“），并包括一个悬挂结构（8; 38 ; 62）承载可移动电极（10; 40）。 定子（5; 35; 77）承载固定电极（12; 42）面对所述可移动电极。 将悬浮的结构（4; 34; 61）被连接到转子 - 锚定区域（16; 44）通过弹性元件（15; 45; 65）。 所述定子包括至少一个定子元件（20; 55; 67），其承载固定电极的多个（12; 42），并固定到定子锚定区域（21; 54）。 一个转子锚定区域和定子锚定区域的沿重心轴线延伸（G; G“），所有这些是在轴垂直于该结构的平面中，通过其重心，和至少另一个所述转子 - 锚定的 区域和定子锚定区域在重心轴线（; G“G）的附近延伸。 由于所有锚定区域的小的距离海誓山盟，和重力作用，应力的中心由于热失配可以被减小。

    Semiconductor integrated inertial sensor with calibration microactuator
    9.
    发明公开
    Semiconductor integrated inertial sensor with calibration microactuator 有权
    Integrierter Halbleiter-Inertialsensor mit Mikroantrieb zur Kalibration

    公开(公告)号：EP1083430A1

    公开(公告)日：2001-03-14

    申请号：EP99830566.8

    申请日：1999-09-10

    申请人： STMicroelectronics S.r.l.

    发明人： Zerbini, Sarah ,  Vigna, Benedetto ,  Garavaglia, Massimo ,  Tomesi, Gianluca

    IPC分类号： G01P15/10 ,  G01P21/00 ,  G01P15/125

    CPC分类号： G01P21/00 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0814

    摘要： The inertial sensor (1) comprises an inner stator (2) and an outer rotor (3) which are electrostatically coupled together by means of mobile sensor arms (5) and fixed sensor arms (9a, 9b). The rotor (3) is connected to a calibration microactuator (12) comprising four sets (27) of actuator elements (13) arranged one for each quadrant of the inertial sensor. There are two actuator elements (13) making up each set, which are identical to each other, are angularly equidistant, and each of which comprises a mobile actuator arm (15) connected to the rotor (3) and bearing a plurality of mobile actuator electrodes (16), and a pair of fixed actuator arms (17a, 17b) which are set on opposite sides with respect to the corresponding mobile actuator arm and bear a plurality of fixed actuator electrodes (19a, 19b). The mobile actuator electrodes (16) and fixed actuator electrodes (19a, 19b) are connected to a driving unit (20) which biases them so as to cause a preset motion of the rotor (3), the motion being detected by a sensing unit (24) connected to the fixed sensor arms (9a, 9b).

    摘要翻译： 惯性传感器（1）包括通过移动传感器臂（5）和固定传感器臂（9a，9b）静电耦合在一起的内部定子（2）和外部转子（3）。 转子（3）连接到校准微致动器（12），该校准微致动器（12）包括为惯性传感器的每个象限布置的一组致动器元件（13）的四组（27）。 构成彼此相同的每组的两个致动器元件（13）成角度等距，并且每个致动器元件（13）包括连接到转子（3）的移动致动器臂（15）并且承载多个移动致动器 电极（16）和一对固定致动器臂（17a，17b），其相对于相应的移动致动器臂设置在相对侧上并且承载多个固定致动器电极（19a，19b）。 移动致动器电极（16）和固定致动器电极（19a，19b）连接到驱动单元（20），该驱动单元（20）偏置它们，以使转子（3）发生预设的运动，运动由感测单元 （24）连接到固定传感器臂（9a，9b）。