发明公开
EP1884974A2 Mems switch and manufacturing method thereof
审中-公开
MEMS-Schalter und Herstellungsverfahrendafür
- 专利标题： Mems switch and manufacturing method thereof
- 专利标题（中）： MEMS-Schalter und Herstellungsverfahrendafür
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申请号： EP07015190.7申请日： 2007-08-02
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公开(公告)号： EP1884974A2公开(公告)日： 2008-02-06
- 发明人: Watanabe, Toru , Sato, Akira , Inaba, Shogo , Mori, Takeshi
- 申请人： Seiko Epson Corporation
- 申请人地址： 4-1, Nishi-shinjuku 2-chome Shinjuku-ku Tokyo 163-0811 JP
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： 4-1, Nishi-shinjuku 2-chome Shinjuku-ku Tokyo 163-0811 JP
- 代理机构： HOFFMANN EITLE
- 优先权： JP2006212915 20060804
- 主分类号： H01H59/00
- IPC分类号： H01H59/00 ; H01C10/00
摘要：
A micro-electro mechanical system (MEMS) switch includes a fixed electrode formed on a first face of a substrate, and a movable electric resistor formed on the first face of the substrate and serving as an electric resistor that divides an electric potential where the MEMS switch is set to a conduction state.
公开/授权文献
- EP1884974A3 Mems switch and manufacturing method thereof 公开/授权日：2009-05-20
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