公开(公告)号：EP1884974A2

公开(公告)日：2008-02-06

申请号：EP07015190.7

申请日：2007-08-02

申请人： Seiko Epson Corporation

发明人： Watanabe, Toru ,  Sato, Akira ,  Inaba, Shogo ,  Mori, Takeshi

IPC分类号： H01H59/00 ,  H01C10/00

CPC分类号： H01H59/0009 ,  H01C10/50 ,  Y10T29/49105

摘要： A micro-electro mechanical system (MEMS) switch includes a fixed electrode formed on a first face of a substrate, and a movable electric resistor formed on the first face of the substrate and serving as an electric resistor that divides an electric potential where the MEMS switch is set to a conduction state.

摘要翻译： 微机电系统（MEMS）开关（10）包括形成在基板的第一面上的固定电极（15）和形成在基板的第一面上并用作电 电阻器，其将MEMS开关（10）设置为导通状态的电位分开。

公开(公告)号：EP1496621A1

公开(公告)日：2005-01-12

申请号：EP04253828.0

申请日：2004-06-25

申请人： SEIKO EPSON CORPORATION

发明人： Watanabe, Toru ,  Takada, Yutaka ,  Inoguchi, Makoto ,  Yajima, Aritsugu ,  Tanaka, Kazuaki ,  Takagi, Shigekazu

IPC分类号： H04B1/40

CPC分类号： H04B1/006 ,  H04B1/0057 ,  H04B1/406 ,  H04B1/52

摘要： The invention seeks to provide a high-frequency composite component capable of: simplifying the circuits from the antenna to the input side of the high-frequency amplifier circuit; suppressing a loss in the signal; and reducing the cost and the size, when a wireless system using plural frequency bands, such as a wireless LAN system using plural frequencies, is constructed. The high-frequency composite component is fabricated by placing an antenna 1 on a multi-layer wiring board 41, placing a multiplexer/demultiplexer circuit 2, matching circuits 3 and 4, and balanced-to-unbalanced transformer circuits 5 and 6 inside the board 41 respectively, and providing input and output terminals 7 through 10 on the side surface of the board 41. The antenna 1 is connected to the multiplexer/demultiplexer circuit 2 via an unbalanced line path 11, and the multiplexer/demultiplexer 2 is connected to the matching circuits 3 and 4 via unbalanced line paths 12 and 13, respectively. The matching circuits 3 and 4 are connected to the balanced-to-unbalanced transformer circuits 5 and 6, respectively, via unbalanced line paths 14 and 15, respectively. The respective balanced terminals of the balanced-to-unbalanced transformer circuits 5 and 6 are connected to the input and output terminals 7 and 8, and 9 and 10, respectively, via balanced line paths 16 and 17, respectively.

摘要翻译： 本发明试图提供一种高频复合元件，其能够：简化从天线到高频放大器电路的输入侧的电路; 抑制信号中的损失; 并且当构建使用多个频带的无线系统（诸如使用多个频率的无线LAN系统）时降低成本和尺寸。 通过将天线1放置在多层布线板41上，将多路复用器/解复用器电路2，匹配电路3和4以及平衡 - 不平衡变压器电路5和6放置在电路板内部来制造高频复合元件 并在基板41的侧面上设置输入输出端子7〜10。天线1经由不平衡线路11与多路复用器/多路分离器电路2连接，多路复用器/多路分离器2与 通过不平衡线路径12和13分别匹配电路3和4。 匹配电路3和4分别通过不平衡线路径14和15分别连接到平衡 - 不平衡变压器电路5和6。 平衡 - 不平衡变压器电路5和6的各个平衡端子分别经由平衡线路径16和17连接到输入和输出端子7和8以及9和10。

公开(公告)号：EP1916222A2

公开(公告)日：2008-04-30

申请号：EP07020581.0

申请日：2007-10-22

申请人： Seiko Epson Corporation

发明人： Watanabe, Toru ,  Sato, Akira ,  Inaba, Shogo ,  Mori, Takeshi

IPC分类号： B81B3/00

CPC分类号： B81B3/0086 ,  B81B2201/0271

摘要： A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.

摘要翻译： 微机电系统（MEMS）器件包括半导体衬底，包括固定电极的MEMS和通过绝缘层形成在半导体衬底上的可移动电极，以及形成在固定电极下方的半导体衬底中的阱。 井是n型井和p型井之一。 p型阱对固定电极施加正电压，而n型阱对固定电极施加负电压。

公开(公告)号：EP1884974A3

公开(公告)日：2009-05-20

申请号：EP07015190.7

申请日：2007-08-02

申请人： Seiko Epson Corporation

发明人： Watanabe, Toru ,  Sato, Akira ,  Inaba, Shogo ,  Mori, Takeshi

IPC分类号： H01H59/00 ,  H01C10/00

CPC分类号： H01H59/0009 ,  H01C10/50 ,  Y10T29/49105

摘要： A micro-electro mechanical system (MEMS) switch (10) includes a fixed electrode (15) formed on a first face of a substrate, and a movable electric resistor (20) formed on the first face of the substrate and serving as an electric resistor that divides an electric potential where the MEMS switch (10) is set to a conduction state.

公开(公告)号：EP1916222A3

公开(公告)日：2013-02-27

申请号：EP07020581.0

申请日：2007-10-22

申请人： Seiko Epson Corporation

发明人： Watanabe, Toru ,  Sato, Akira ,  Inaba, Shogo ,  Mori, Takeshi

IPC分类号： B81B3/00

CPC分类号： B81B3/0086 ,  B81B2201/0271

摘要： A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.

公开(公告)号：EP1914195A3

公开(公告)日：2013-02-20

申请号：EP07020420.1

申请日：2007-10-18

申请人： Seiko Epson Corporation

发明人： Watanabe, Toru ,  Sato, Akira ,  Inaba, Shogo ,  Mori, Takeshi

IPC分类号： B81B3/00

CPC分类号： B81B3/0086

摘要： A micro electro mechanical system (MEMS) device includes: a fixed electrode made of silicon and provided above a semiconductor substrate; a movable electrode made of silicon and arranged in a mechanically movable manner by having a gap from the semiconductor substrate; and a wiring layered part that is provided around the movable electrode, covers a portion of the fixed electrode and includes wiring. One of the fixed electrode and the movable electrode is implanted with an impurity ion and at least a part of the portion of the fixed electrode covered by the wiring layered part is silicidized.

公开(公告)号：EP1914195A2

公开(公告)日：2008-04-23

申请号：EP07020420.1

申请日：2007-10-18

申请人： Seiko Epson Corporation

发明人： Watanabe, Toru ,  Sato, Akira ,  Inaba, Shogo ,  Mori, Takeshi

IPC分类号： B81B3/00

CPC分类号： B81B3/0086

摘要： A micro electro mechanical system (MEMS) device includes: a fixed electrode made of silicon and provided above a semiconductor substrate; a movable electrode made of silicon and arranged in a mechanically movable manner by having a gap from the semiconductor substrate; and a wiring layered part that is provided around the movable electrode, covers a portion of the fixed electrode and includes wiring. One of the fixed electrode and the movable electrode is implanted with an impurity ion and at least a part of the portion of the fixed electrode covered by the wiring layered part is silicidized.

摘要翻译： 一种微电子机械系统（MEMS）装置，包括：由硅制成并设置在半导体衬底之上的固定电极; 由硅制成的可移动电极，通过与半导体衬底有间隙以机械可移动的方式布置; 以及设置在所述可动电极周围的布线层叠部，覆盖所述固定电极的一部分并且包括布线。 固定电极和可动电极中的一个被注入杂质离子，并且由布线层叠部分覆盖的固定电极的部分的至少一部分被硅化。