发明授权
- 专利标题: Sensor for detecting acceleration and angular velocity
- 专利标题(中): 用于检测加速度和角速度的传感器
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申请号: EP08001145.5申请日: 2008-01-22
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公开(公告)号: EP1953499B1公开(公告)日: 2017-09-20
- 发明人: Okada, Kazuhiro
- 申请人: WACOH CORPORATION
- 申请人地址: 73, Sugaya 4-chome Ageo-Shi, Saitama 362-0003 JP
- 专利权人: WACOH CORPORATION
- 当前专利权人: WACOH CORPORATION
- 当前专利权人地址: 73, Sugaya 4-chome Ageo-Shi, Saitama 362-0003 JP
- 代理机构: Schmitt-Nilson Schraud Waibel Wohlfrom Patentanwälte Partnerschaft mbB
- 优先权: JP2007023959 20070202
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01P15/09 ; G01P15/12 ; G01P15/18 ; G01P15/08
摘要:
Static and dynamic acceleration as well as static and dynamic angular velocity are detected with a simple structure. An acceleration detecting section (100) includes a weight body (110), a pedestal (130) around the weight body (110), flexible plate-like bridge portions (121-124), and piezoresistive elements (P) embedded in the upper surface of the bridge portions (121-124). An angular velocity detecting section (200) includes a weight body (210), a pedestal (230) around the weight body (210), flexible plate-like bridge portions (221-224), and piezoelectric elements (D, E) fixed to the upper surface of the bridge portions (221-224). The pedestals (130, 230) are fixed to a device chassis (400). When the weight body (110) is displaced by acceleration, the plate-like bridge portions (121-124) are deflected, so that the acceleration is detected based on the change in the electrical resistances of the piezoresistive elements (P). When the weight body (210) is displaced by a Coriolis force based on angular velocity while supplying alternating signals to the piezoelectric elements (E) to oscillate the weight body (210), the plate-like bridge portions (221-224) are deflected, so that the angular velocity is detected based on charge generation in the piezoelectric elements (D).
公开/授权文献
- EP1953499A3 Sensor for detecting acceleration and angular velocity 公开/授权日:2012-01-25
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