发明授权
EP1953499B1 Sensor for detecting acceleration and angular velocity 有权
用于检测加速度和角速度的传感器

Sensor for detecting acceleration and angular velocity
摘要:
Static and dynamic acceleration as well as static and dynamic angular velocity are detected with a simple structure. An acceleration detecting section (100) includes a weight body (110), a pedestal (130) around the weight body (110), flexible plate-like bridge portions (121-124), and piezoresistive elements (P) embedded in the upper surface of the bridge portions (121-124). An angular velocity detecting section (200) includes a weight body (210), a pedestal (230) around the weight body (210), flexible plate-like bridge portions (221-224), and piezoelectric elements (D, E) fixed to the upper surface of the bridge portions (221-224). The pedestals (130, 230) are fixed to a device chassis (400). When the weight body (110) is displaced by acceleration, the plate-like bridge portions (121-124) are deflected, so that the acceleration is detected based on the change in the electrical resistances of the piezoresistive elements (P). When the weight body (210) is displaced by a Coriolis force based on angular velocity while supplying alternating signals to the piezoelectric elements (E) to oscillate the weight body (210), the plate-like bridge portions (221-224) are deflected, so that the angular velocity is detected based on charge generation in the piezoelectric elements (D).
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