发明公开
- 专利标题： FLEXIBLE MICRO/NANOFLUIDIC DEVICES
- 专利标题（中）： 柔性微/纳米流体器件
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申请号： EP07765875申请日： 2007-05-22
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公开(公告)号： EP2022753A4公开(公告)日： 2013-06-05
- 发明人: BLANCO BARRO FCO JAVIER , AGUIRREGABIRIA IZAGUIRRE MARIA , EZKERRA FERNANDEZ AITOR , SCHULZE JANETTE LILIAN MARIA , RUANO LOPEZ JESUS MIGUEL , MAYORA ORIA KEPA
- 申请人： IKERLAN S COOP , POC MICROSOLUTIONS SL
- 专利权人： IKERLAN S COOP,POC MICROSOLUTIONS SL
- 当前专利权人： IKERLAN S COOP,POC MICROSOLUTIONS SL
- 优先权： ES200601322 2006-05-22
- 主分类号： B81C1/00
- IPC分类号： B81C1/00 ; A61B5/00 ; A61M31/00 ; A61M37/00 ; B01L3/00 ; B81B3/00 ; B82Y5/00 ; H01L21/64
摘要：
A micro-nanofluidic device is fabricated by depositing photo-curable resin (5) from heat set polymer (3) on 2 substrates (1) (capsule 1 and capsule 2) of polymeric material (2); carrying out photolithography at low temperature to the layers of photo-curable resin; depositing metallic-type components (4) in the capsule; micro-structuring the deposited metallic components; depositing a layer of photo-curable resin from heat set polymer on capsule 1; carrying out photolithography; sealing the obtained capsules; and cutting the device.
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