公开(公告)号：EP2022753A4

公开(公告)日：2013-06-05

申请号：EP07765875

申请日：2007-05-22

申请人： IKERLAN S COOP ,  POC MICROSOLUTIONS SL

发明人： BLANCO BARRO FCO JAVIER ,  AGUIRREGABIRIA IZAGUIRRE MARIA ,  EZKERRA FERNANDEZ AITOR ,  SCHULZE JANETTE LILIAN MARIA ,  RUANO LOPEZ JESUS MIGUEL ,  MAYORA ORIA KEPA

IPC分类号： B81C1/00 ,  A61B5/00 ,  A61M31/00 ,  A61M37/00 ,  B01L3/00 ,  B81B3/00 ,  B82Y5/00 ,  H01L21/64

CPC分类号： B01L3/502707 ,  A61M2037/0053 ,  B01L2200/0689 ,  B01L2300/0645 ,  B01L2300/0816 ,  B01L2400/0415 ,  B81B2201/0214 ,  B81B2201/058 ,  B81B2203/0118 ,  B81C1/00119 ,  B82Y40/00

摘要： A micro-nanofluidic device is fabricated by depositing photo-curable resin (5) from heat set polymer (3) on 2 substrates (1) (capsule 1 and capsule 2) of polymeric material (2); carrying out photolithography at low temperature to the layers of photo-curable resin; depositing metallic-type components (4) in the capsule; micro-structuring the deposited metallic components; depositing a layer of photo-curable resin from heat set polymer on capsule 1; carrying out photolithography; sealing the obtained capsules; and cutting the device.