发明公开
- 专利标题： Method and apparatus for fabricating vertical deposition mask
- 专利标题（中）： 用于制造垂直沉积掩模的方法和设备
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申请号： EP08169477.0申请日： 2008-11-20
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公开(公告)号： EP2063320A2公开(公告)日： 2009-05-27
- 发明人: Hong, Jong-Won , Kang, Eugene , Park, Si-Young
- 申请人： Samsung Mobile Display Co., Ltd.
- 申请人地址： 575 Shin-dong, Yeongtong-gu, Suwon-si Gyeonggi-do KR
- 专利权人： Samsung Mobile Display Co., Ltd.
- 当前专利权人： Samsung Mobile Display Co., Ltd.
- 当前专利权人地址： 575 Shin-dong, Yeongtong-gu, Suwon-si Gyeonggi-do KR
- 代理机构： Hengelhaupt, Jürgen
- 优先权： KR20070118787 20071120
- 主分类号： G03F7/12
- IPC分类号： G03F7/12 ; C23C14/04
摘要：
A method and apparatus for fabricating a vertical deposition mask capable of welding a mask sheet and a mask frame for preventing a large area mask from drooping due to the weight of the mask. The apparatus includes a tensioning device for tensioning a mask sheet and a welder for attaching a mask frame to a circumference of the mask sheet. The tensioning device includes clamps for supporting the mask sheet and tensioners coupled to the clamps for applying tensile force to the clamps and to evenly fix in place the mask sheet by the clamps.
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