Method and apparatus for fabricating vertical deposition mask
    1.
    发明公开
    Method and apparatus for fabricating vertical deposition mask 有权
    用于制造垂直沉积掩模的方法和设备

    公开(公告)号:EP2063320A2

    公开(公告)日:2009-05-27

    申请号:EP08169477.0

    申请日:2008-11-20

    IPC分类号: G03F7/12 C23C14/04

    CPC分类号: G03F7/12 C23C14/042

    摘要: A method and apparatus for fabricating a vertical deposition mask capable of welding a mask sheet and a mask frame for preventing a large area mask from drooping due to the weight of the mask. The apparatus includes a tensioning device for tensioning a mask sheet and a welder for attaching a mask frame to a circumference of the mask sheet. The tensioning device includes clamps for supporting the mask sheet and tensioners coupled to the clamps for applying tensile force to the clamps and to evenly fix in place the mask sheet by the clamps.

    摘要翻译: 一种用于制造能够焊接掩模片和掩模框架以防止大面积掩模由于掩模重量而下垂的垂直沉积掩模的方法和设备。 该设备包括用于张紧掩模片的张紧装置和用于将掩模框架附接到掩模片周边的焊机。 张紧装置包括用于支撑面罩片的夹具和与夹具连接的张紧器,用于向夹具施加张力并通过夹具均匀地固定面罩片材。

    Method and apparatus for fabricating vertical deposition mask
    2.
    发明授权
    Method and apparatus for fabricating vertical deposition mask 有权
    方法和装置用于制造垂直沉积掩模

    公开(公告)号:EP2063320B1

    公开(公告)日:2011-03-02

    申请号:EP08169477.0

    申请日:2008-11-20

    IPC分类号: G03F7/12 C23C14/04

    CPC分类号: G03F7/12 C23C14/042

    摘要: A method and apparatus for fabricating a vertical deposition mask capable of welding a mask sheet and a mask frame for preventing a large area mask from drooping due to the weight of the mask. The apparatus includes a tensioning device for tensioning a mask sheet and a welder for attaching a mask frame to a circumference of the mask sheet. The tensioning device includes clamps for supporting the mask sheet and tensioners coupled to the clamps for applying tensile force to the clamps and to evenly fix in place the mask sheet by the clamps.

    Method and apparatus for fabricating vertical deposition mask
    3.
    发明公开
    Method and apparatus for fabricating vertical deposition mask 有权
    方法和装置用于制造垂直沉积掩模

    公开(公告)号:EP2063320A3

    公开(公告)日:2009-07-29

    申请号:EP08169477.0

    申请日:2008-11-20

    IPC分类号: G03F7/12 C23C14/04

    CPC分类号: G03F7/12 C23C14/042

    摘要: A method and apparatus for fabricating a vertical deposition mask capable of welding a mask sheet and a mask frame for preventing a large area mask from drooping due to the weight of the mask. The apparatus includes a tensioning device for tensioning a mask sheet and a welder for attaching a mask frame to a circumference of the mask sheet. The tensioning device includes clamps for supporting the mask sheet and tensioners coupled to the clamps for applying tensile force to the clamps and to evenly fix in place the mask sheet by the clamps.