发明公开
- 专利标题: TRANSDUCER FOR USE IN HARSH ENVIRONMENTS
- 专利标题(中): 转换器用于严苛ENVIRONMENTS
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申请号: EP07814915.0申请日: 2007-09-19
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公开(公告)号: EP2082205A2公开(公告)日: 2009-07-29
- 发明人: ERIKSEN, Odd Harald, Steen , CHILDRESS, Kimiko, J. , GUO, Shuwen
- 申请人: Rosemount Aerospace Inc.
- 申请人地址: 14300 Judicial Road Burnsville, MN 55306 US
- 专利权人: Rosemount Aerospace Inc.
- 当前专利权人: Rosemount Aerospace Inc.
- 当前专利权人地址: 14300 Judicial Road Burnsville, MN 55306 US
- 代理机构: Asquith, Julian Peter
- 优先权: US523214 20060919
- 国际公布: WO2008036705 20080327
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A pressure sensor (10) for use in a harsh environment including a substrate (14) and a sensor die (12) directly coupled to the substrate (14) by a bond frame (70) positioned between the substrate (14) and the sensor die (12). The sensor die (12) includes a generally flexible diaphragm (16) configured to flex when exposed to a sufficient differential pressure thereacross. The sensor (10) further includes a piezoelectric or piezoresistive sensing element (46) at least partially located on the diaphragm (16) such that the sensing element (46) provides an electrical signal upon flexure of the diaphragm (16). The sensor (10) also includes an connecting component (22) electrically coupled to the sensing element (46) at a connection location that is fluidly isolated from the diaphragm (16) by the bond frame (70). The bond frame (70) is made of materials and the connecting component (22) is electrically coupled to the sensing element (46) by the same materials of the bond frame (70).
公开/授权文献
- EP2082205B1 TRANSDUCER FOR USE IN HARSH ENVIRONMENTS 公开/授权日:2016-06-29
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