发明公开
EP2139032A4 HIGHLY RELIABLE GOLD ALLOY BONDING WIRE AND SEMICONDUCTOR DEVICE
审中-公开
非常可靠的金合金引线,连接和半导体器件
- 专利标题: HIGHLY RELIABLE GOLD ALLOY BONDING WIRE AND SEMICONDUCTOR DEVICE
- 专利标题(中): 非常可靠的金合金引线,连接和半导体器件
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申请号: EP08738890申请日: 2008-03-26
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公开(公告)号: EP2139032A4公开(公告)日: 2009-12-30
- 发明人: MURAI HIROSHI , CHIBA JUN , AMADA FUJIO
- 申请人: TANAKA ELECTRONICS IND
- 专利权人: TANAKA ELECTRONICS IND
- 当前专利权人: TANAKA ELECTRONICS IND
- 优先权: JP2007108733 2007-04-17
- 主分类号: H01L21/60
- IPC分类号: H01L21/60 ; C22C5/02
摘要:
[Issues to be solved] Providing enhanced bonding reliability of Au alloy bonding wire with low electrical resistivity to Al electrode of semiconductor device, and its application of semiconductor device is bonded with Al electrode pad by the same wire. [Solution means] Au alloy bonding wire comprising: 0.02 - 0.3 mass % Ag, total amount of 10 - 200 mass ppm at least one element of Ge and/or Si, and/or total amount of 10 - 200 mass ppm at least one element of Al and/or Cu, with residual of Au. Moreover, Al and/or Al alloy pad bonded with the above Au alloy bonding wire.
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