发明公开
- 专利标题： Method of machining a work piece with a focused particle beam
- 专利标题（中）： 用聚焦粒子束加工工件的方法
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申请号： EP09167310.3申请日： 2009-08-06
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公开(公告)号： EP2151847A1公开(公告)日： 2010-02-10
- 发明人: Botman, Aurelién , Freitag, Bert , Mulders, Johannes
- 申请人： FEI COMPANY
- 申请人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 专利权人： FEI COMPANY
- 当前专利权人： FEI COMPANY
- 当前专利权人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 代理机构： Bakker, Hendrik
- 优先权： EP08162003 20080807
- 主分类号： H01J37/317
- IPC分类号： H01J37/317 ; G01N1/28 ; H01L21/31 ; H01L21/3205
摘要：
The invention relates to a method for producing high-quality samples for e.g. TEM inspection. When thinning samples with e.g. a Focused Ion Beam apparatus (FIB), the sample often oxidizes when taken from the FIB due to the exposure to air. This results in low-quality samples, that may be unfit for further analysis. By forming a passivation layer, preferably a hydrogen passivation layer, on the sample in situ , that is: before taking the sample from the FIB, high quality samples are obtained.
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