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18 条记录 (耗时 0.009 秒)

    Method for inspecting a sample
    1.
    发明公开
    Method for inspecting a sample 有权
    检验样品的方法

    公开(公告)号：EP2278307A1

    公开(公告)日：2011-01-26

    申请号：EP10169200.2

    申请日：2010-07-12

    申请人： FEI COMPANY

    发明人： Freitag, Bert ,  Rosenthal, Alex ,  Phifer, Daniel

    IPC分类号： G01N23/225 ,  H01J37/20

    CPC分类号： G01N23/2251 ,  G01N2223/611 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2008

    摘要： The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed.
    After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample.
    Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing.
    The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.

    摘要翻译： 本发明描述了一种用于在电子显微镜中检查样品的方法。 样本载体500示出了电极504,507，连接焊盘505,508与样本将放置在其上的区域A. 将样品放置在样品载体上之后，将导电图案沉积在样品上，以便可以将电压和电流施加到样品的局部部分。 在样品上施加图案可以用例如光束诱导沉积或喷墨印刷完成。 本发明还教导了在样本中构建电子组件，诸如电阻器，电容器，电感器和诸如FET的有源元件。

    Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus
    3.
    发明公开
    Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus 审中-公开
    Verfahren zum Erhalten eines Rastertransmissionsbildes einer Probe在einer teilchenoptischen Vorrichtung

    公开(公告)号：EP2063450A1

    公开(公告)日：2009-05-27

    申请号：EP07121186.6

    申请日：2007-11-21

    申请人： FEI COMPANY

    发明人： Luecken, Uwe ,  Freitag, Bert ,  Sourty, Erwan ,  Yakushevska, Alevtyna

    IPC分类号： H01J37/28

    CPC分类号： H01J37/263 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2802 ,  H01J2237/2803 ,  H01J2237/2809

    摘要： The invention discloses a method for Scanning Transmission Electron Microscopy (STEM). In STEM a sample (1) is scanned with a focused beam of electrons (2). The diameter of the cross-over R can be as low as 0.1 nm. As known to the person skilled in the art the diameter of the cross-over depends on the opening half-angle α of the beam. Therefore for optimum resolution an opening half-angle is chosen at which the diameter of the cross-over R(α) shows a minimum.
    For thick samples however the resolution is, for those parts of the sample removed from the cross-over plane, limited by the convergence of the beam, resulting in a diameter D of the beam at the surface of the sample.
    According to the invention the opening angle is chosen to balance the contribution of convergence and of diameter of the cross-over by choosing an opening half-angle α smaller than the opening half-angle resulting in the smallest R(α). Effectively the sample is then scanned with a beam that has a substantially constant diameter over the length of the sample material through which the electrons have to travel.

    摘要翻译： 本发明公开了一种扫描透射电子显微镜（STEM）的方法。 在STEM中，用聚焦的电子束扫描样品（1）（2）。 交叉R的直径可以低至0.1nm。 如本领域技术人员所知，交叉的直径取决于梁的开口半角±。 因此，为了获得最佳分辨率，选择开口半角，其中交叉R（±）的直径显示为最小值。 然而，对于厚样品，对于从交叉平面移除的样品的那些部分，由束的会聚限制，导致样品表面处的束的直径D。 根据本发明，通过选择比最小R（±）的开半角小的开度半角±±，选择开度角来平衡会聚和交叉直径的贡献。 然后有效地将样品用在电子必须行进的样品材料的长度上具有基本恒定直径的光束进行扫描。

    SYSTEM AND METHOD FOR SIMULTANEOUS PHASE CONTRAST IMAGING AND ELECTRON ENERGY-LOSS SPECTROSCOPY
    4.
    发明公开
    SYSTEM AND METHOD FOR SIMULTANEOUS PHASE CONTRAST IMAGING AND ELECTRON ENERGY-LOSS SPECTROSCOPY 审中-公开

    公开(公告)号：EP3965137A1

    公开(公告)日：2022-03-09

    申请号：EP21192493.1

    申请日：2021-08-23

    申请人： FEI Company

    发明人： Lazic, Ivan ,  Vespucci, Stefano ,  Bosch, Eric ,  Freitag, Bert

    IPC分类号： H01J37/244 ,  H01J37/28

    摘要： A method and system for imaging a sample (60) with charged particles comprises directing charged particles (111) towards the sample along a primary axis, and simultaneously detecting a first portion and a second portion of the charged particles transmitted through the sample (261-265) with a first detector (250) and a second detector (270), respectively. The second detector is positioned downstream of the first detector. Each of the transmitted charged particles exits the sample at an exit angle (210) between a direction of the transmitted charged particle and the primary axis. The exit angles of the first portion of the transmitted charged particles overlap with the exit angles of the second portion of the transmitted charged particles. In this way, complementary information, such as the structural and compositional information, may be obtained simultaneously.

    Method for inspecting a sample
    5.
    发明公开
    Method for inspecting a sample 审中-公开
    Verfahren zur Untersuchung einer Probe

    公开(公告)号：EP2278306A1

    公开(公告)日：2011-01-26

    申请号：EP09165269.3

    申请日：2009-07-13

    申请人： FEI COMPANY

    发明人： Freitag, Bert ,  Rosenthal, Georg ,  Phifer, Daniel

    IPC分类号： G01N23/225 ,  H01J37/20

    CPC分类号： G01N23/2251 ,  G01N2223/611 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2008

    摘要： The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed.
    After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample. Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing.
    The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.

    摘要翻译： 本发明描述了一种在电子显微镜中检查样品的方法。 样品载体500显示电极504,407连接焊盘505,508与其上要放置样品的区域A. 将样品放在样品载体上后，导电图案沉积在样品上，从而可以将电压和电流施加到样品的局部部分。 将样品应用于样品可以用例如光束沉积或喷墨打印进行。 本发明还教导在样品中构建诸如电阻器，电容器，电感器和诸如FET的有源元件的电子部件。

    Method of machining a work piece with a focused particle beam
    6.
    发明公开
    Method of machining a work piece with a focused particle beam 审中-公开
    维尔法赫尔·祖尔·费里贡恩（WertstückseenWerkstücksmit einem fokussierten Teilchenstrahl）

    公开(公告)号：EP2151848A1

    公开(公告)日：2010-02-10

    申请号：EP08162003.1

    申请日：2008-08-07

    申请人： FEI COMPANY

    发明人： Mulders, Johannes ,  Freitag, Bert ,  Botman, Aurélien

    IPC分类号： H01J37/317 ,  G01N1/28 ,  H01L21/31 ,  H01L21/3205

    CPC分类号： G01N1/286 ,  G01N1/32 ,  H01J37/317 ,  H01J37/3178 ,  H01J2237/31745

    摘要： The invention relates to a method for producing high-quality samples for e.g. TEM inspection. When thinning samples with e.g. a Focused Ion Beam apparatus (FIB), the sample often oxidizes when taken from the FIB due to the exposure to air. This results in low-quality samples, that may be unfit for further analysis. By forming a passivation layer, preferably a hydrogen passivation layer, on the sample in situ , that is: before taking the sample from the FIB, high quality samples are obtained.

    摘要翻译： 本发明涉及一种用于生产高质量样品的方法。 TEM检查。 当用例如稀释样品 聚焦离子束装置（FIB），样品经FIB吸收时经常氧化，因为暴露于空气中。 这导致低质量的样品，这可能不适合进一步分析。 通过在样品上原位形成钝化层，优选氢钝化层，即：在从FIB中取样之前，获得高质量的样品。

    DUAL SPEED ACQUISITION FOR DRIFT CORRECTED, FAST, LOW DOSE, ADAPTIVE COMPOSITIONAL CHARGED PARTICLE IMAGING
    7.
    发明公开
    DUAL SPEED ACQUISITION FOR DRIFT CORRECTED, FAST, LOW DOSE, ADAPTIVE COMPOSITIONAL CHARGED PARTICLE IMAGING 审中-公开

    公开(公告)号：EP4064323A1

    公开(公告)日：2022-09-28

    申请号：EP22163350.6

    申请日：2022-03-21

    申请人： FEI Company

    发明人： Potocek, Pavel ,  Schoenmakes, Remco ,  Peemen, Maurice ,  Freitag, Bert

    IPC分类号： H01J37/26

    摘要： Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.

    Simultaneous electron detection
    8.
    发明公开
    Simultaneous electron detection 有权
    同步电子邮件

    公开(公告)号：EP2387062A1

    公开(公告)日：2011-11-16

    申请号：EP11165383.8

    申请日：2011-05-10

    申请人： FEI Company

    发明人： Tiemeijer, Peter ,  Freitag, Bert ,  Lazar, Sorin

    IPC分类号： H01J37/28 ,  H01J37/05

    CPC分类号： H01J37/05 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2802 ,  H01J2237/2804

    摘要： The invention provides multiple detectors that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.

    摘要翻译： 本发明提供了多个检测器，其检测已经通过样品的电子。 检测器优选在电子通过根据其能量分离电子的棱镜之后检测电子。 不同能量范围的电子然后由不同的检测器检测，优选地，至少一个检测器测量当电子通过样品时由电子损失的能量。 本发明的一个实施例在核心损耗电子上提供EELS，同时从低损耗电子提供亮场STEM信号。