发明公开
- 专利标题: BONDING WIRE
- 专利标题(中): 结合线
-
申请号: EP08846565.3申请日: 2008-09-11
-
公开(公告)号: EP2208801A1公开(公告)日: 2010-07-21
- 发明人: MURAI, Hiroshi , CHIBA, Jun , AMADA, Fujio
- 申请人: Tanaka Denshi Kogyo K.K.
- 申请人地址: Tokyo Building 22F 7-3 Marunouchi 2-chome Chiyoda-ku Tokyo 100-6422 JP
- 专利权人: Tanaka Denshi Kogyo K.K.
- 当前专利权人: Tanaka Denshi Kogyo K.K.
- 当前专利权人地址: Tokyo Building 22F 7-3 Marunouchi 2-chome Chiyoda-ku Tokyo 100-6422 JP
- 代理机构: Stona, Daniel
- 优先权: JP2007289091 20071106
- 国际公布: WO2009060662 20090514
- 主分类号: C22C5/02
- IPC分类号: C22C5/02 ; H01L21/60
摘要:
[Issues to be solved]
Second bonding failures caused attached oxide of additive elements on high purity Au bonding wire are to be dissolved.
[Solution means]
Au alloy bonding wires comprising: 5 - 100 wt ppm Mg, 5 - 20 wt ppm In, 5 - 20 wt ppm Al, 5 - 20 wt ppm Yb, and Au residual is more than 99.995 wt % purity, and adding 5 - 20 wt ppm Ca, and for these alloys adding at least more than one element among 5 - 20 wt ppm La, 5 - 20 wt ppm Lu, 5 - 100 wt ppm Sn, 5 - 100 wt ppm Sr to the alloy, and/or, more over, adding 0.01 - 1.2 wt % Pd to these alloys. Bonding wire, which contains these trace additive elements .do not cause of disturbance by accumulated contamination, because of contamination, which formed at ball formation by micro discharge and at the first bonding to attached on tip of capillary, transferring to the wire at second bonding.
Second bonding failures caused attached oxide of additive elements on high purity Au bonding wire are to be dissolved.
[Solution means]
Au alloy bonding wires comprising: 5 - 100 wt ppm Mg, 5 - 20 wt ppm In, 5 - 20 wt ppm Al, 5 - 20 wt ppm Yb, and Au residual is more than 99.995 wt % purity, and adding 5 - 20 wt ppm Ca, and for these alloys adding at least more than one element among 5 - 20 wt ppm La, 5 - 20 wt ppm Lu, 5 - 100 wt ppm Sn, 5 - 100 wt ppm Sr to the alloy, and/or, more over, adding 0.01 - 1.2 wt % Pd to these alloys. Bonding wire, which contains these trace additive elements .do not cause of disturbance by accumulated contamination, because of contamination, which formed at ball formation by micro discharge and at the first bonding to attached on tip of capillary, transferring to the wire at second bonding.
公开/授权文献
- EP2208801B1 BONDING WIRE 公开/授权日:2012-04-04
信息查询