- 专利标题: LASER BEAM WORKING MACHINE
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申请号: EP09837544.7申请日: 2009-12-04
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公开(公告)号: EP2388103A1公开(公告)日: 2011-11-23
- 发明人: FUKUMITSU, Kenshi , OISHI, Shingo , AOSHIMA, Shinichiro
- 申请人: Hamamatsu Photonics K.K.
- 申请人地址: 1126-1, Ichino-cho Higashi-ku Hamamatsu-shi, Shizuoka 435-8558 JP
- 专利权人: Hamamatsu Photonics K.K.
- 当前专利权人: Hamamatsu Photonics K.K.
- 当前专利权人地址: 1126-1, Ichino-cho Higashi-ku Hamamatsu-shi, Shizuoka 435-8558 JP
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser
- 优先权: JP2009003945 20090109
- 国际公布: WO2010079658 20100715
- 主分类号: B23K26/38
- IPC分类号: B23K26/38 ; B23K26/03 ; B23K26/06 ; B23K26/073 ; B23K26/08 ; B23K26/40 ; H01L21/301
摘要:
A cylindrical lens (4) diverges a laser beam (L1) in the Y-axis direction (i.e., within the YZ plane) but neither diverges nor converges it in the X-axis direction (i.e., within the ZX plane). An objective lens (5) converges the laser beam (L1) emitted from the cylindrical lens (4) into a point P1 in the Y-axis direction and into a point P2 in the X-axis direction. As a consequence, the cross section of the laser beam (L1) becomes elongated forms extending in the X- and Y-axis directions at the points P1, P2, respectively. Therefore, when the points P1, P2 are located on the outside and inside of the work (S), respectively, an elongated working area extending in the Y-axis direction can be formed in a portion where the point P2 is positioned within the work (S).
公开/授权文献
- EP2388103B1 LASER BEAM WORKING MACHINE 公开/授权日:2017-08-02
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