发明公开
EP2416165A1 Method of forming a 3D reconstruction of a sample using a scanning probe microscope
审中-公开
Verfahren zur Bildung einer 3D-Rekonstruktion einer Probe mittels Rastersondenmikroskop
- 专利标题： Method of forming a 3D reconstruction of a sample using a scanning probe microscope
- 专利标题（中）： Verfahren zur Bildung einer 3D-Rekonstruktion einer Probe mittels Rastersondenmikroskop
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申请号： EP10171871.6申请日： 2010-08-04
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公开(公告)号： EP2416165A1公开(公告)日： 2012-02-08
- 发明人: Stokes, Deborah , Geurts, Remco , Hubert, Dominicus , Barber, Asa
- 申请人： FEI Company
- 申请人地址： 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 专利权人： FEI Company
- 当前专利权人： FEI Company
- 当前专利权人地址： 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 代理机构： Bakker, Hendrik
- 主分类号： G01Q30/02
- IPC分类号： G01Q30/02 ; G01Q30/10 ; G01Q30/16 ; G01Q30/20 ; G01N1/42 ; H01J37/305
摘要：
The invention relates to a method of inspecting a sample (101), the method comprising:
repeatedly
• Preparing a fresh surface (304,306) on the block face of a sample by removing the surface layer,
• Inspecting the block face with a scanning probe microscope (100), resulting in information of the current surface layer,
Followed by
• Combining the information of a multitude of inspections into a 3D reconstruction of the sample,
Characterized in that
The removal is performed in an evacuated environment by ion beam milling.
By performing the removal of the surface with ion beam milling, mechanical deformations are avoided, surface roughness is reduced, and the vertical resolution is enhanced, resulting in a better 3D reconstruction of the sample.
repeatedly
• Preparing a fresh surface (304,306) on the block face of a sample by removing the surface layer,
• Inspecting the block face with a scanning probe microscope (100), resulting in information of the current surface layer,
Followed by
• Combining the information of a multitude of inspections into a 3D reconstruction of the sample,
Characterized in that
The removal is performed in an evacuated environment by ion beam milling.
By performing the removal of the surface with ion beam milling, mechanical deformations are avoided, surface roughness is reduced, and the vertical resolution is enhanced, resulting in a better 3D reconstruction of the sample.
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