公开(公告)号：EP2416165A1

公开(公告)日：2012-02-08

申请号：EP10171871.6

申请日：2010-08-04

申请人： FEI Company

发明人： Stokes, Deborah ,  Geurts, Remco ,  Hubert, Dominicus ,  Barber, Asa

IPC分类号： G01Q30/02 ,  G01Q30/10 ,  G01Q30/16 ,  G01Q30/20 ,  G01N1/42 ,  H01J37/305

CPC分类号： G01Q30/02 ,  G01N1/32 ,  G01N1/42 ,  G01Q30/10 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/3056 ,  H01J2237/31745

摘要： The invention relates to a method of inspecting a sample (101), the method comprising:
repeatedly
• Preparing a fresh surface (304,306) on the block face of a sample by removing the surface layer,
• Inspecting the block face with a scanning probe microscope (100), resulting in information of the current surface layer,

Followed by
• Combining the information of a multitude of inspections into a 3D reconstruction of the sample,

Characterized in that
The removal is performed in an evacuated environment by ion beam milling.

By performing the removal of the surface with ion beam milling, mechanical deformations are avoided, surface roughness is reduced, and the vertical resolution is enhanced, resulting in a better 3D reconstruction of the sample.

摘要翻译： 本发明涉及一种检查样品（101）的方法，所述方法包括：重复地通过去除表面层在样品的块面上准备新鲜的表面（304,306），¢检查块面用扫描 探针显微镜（100），产生当前表面层的信息，其次为¢将大量检查的信息合并到样品的三维重建中，其特征在于通过离子束铣削在抽真空的环境中进行去除 。 通过用离子束铣削进行表面去除，避免了机械变形，减小了表面粗糙度，并提高了垂直分辨率，从而导致样品更好的3D重建。