发明公开
EP2423942A3 Detector system for transmission electron microscope 有权
对于透射电子显微镜检测器系统

  • 专利标题: Detector system for transmission electron microscope
  • 专利标题(中): 对于透射电子显微镜检测器系统
  • 申请号: EP11178366.8
    申请日: 2011-08-23
  • 公开(公告)号: EP2423942A3
    公开(公告)日: 2014-01-15
  • 发明人: Luecken, UweSchoenmakers, RemcoSchuurmans, Frank
  • 申请人: FEI COMPANY
  • 申请人地址: 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
  • 专利权人: FEI COMPANY
  • 当前专利权人: FEI COMPANY
  • 当前专利权人地址: 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
  • 代理机构: Bakker, Hendrik
  • 优先权: US376596P 20100824; EP10193773 20101206
  • 主分类号: H01J37/22
  • IPC分类号: H01J37/22 H01J37/26
Detector system for transmission electron microscope
摘要:
In a transmission electron microscope detector system, image data is read out from the pixels and analyzed during an image acquisition period. The image acquisition process is modified depending on the results of the analysis. For example, the analyses may indicate the inclusion in the data of an image artifact, such as charging or bubbling, and data including the artifact may be eliminated form the final image. CMOS detectors provide for selective read out of pixels at high data rates, allowing for real-time adaptive imaging.
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