公开(公告)号：EP2579575A1

公开(公告)日：2013-04-10

申请号：EP11184107.8

申请日：2011-10-06

申请人： FEI Company

发明人： Janssen, Bart ,  Van Hoften, Gerald ,  Luecken, Uwe

IPC分类号： H04N5/32 ,  H04N5/374 ,  H04N5/357

CPC分类号： H04N5/335 ,  H01L27/146 ,  H04N5/32 ,  H04N5/3575 ,  H04N5/374

摘要： The invention relates to a method of using a CMOS chip for direct charged particle counting. To avoid reset noise, it is known to use Correlative Double Sampling: for each signal value the pixel is sampled twice: once (204) directly after reset and once (206) after an integration time. The signal is then determined (208) by subtracting the reset value from the later acquired value, and the pixel is reset again (202). Typically the integration time is chosen sufficiently short that the chance that two particles impinge on one pixel is negligible, thereby enabling event counting.
Although this technique removes reset noise and fixed pattern noise, it also lowers the image rate to half the frame rate, as a pixel needs to be sampled twice for one signal value.
The invention proposes to reset the pixel only after a large number of read-outs. This is based on the insight that typically a large number of events, typically approximately 10, are needed to cause a full pixel. By either resetting after a large number of images, or when one pixel of the image shows a signal above a predetermined value (for example 0.8 x the full-well capacity), the image speed can be almost doubled when compared to the prior art method, using a reset after acquiring a signal.

摘要翻译： 本发明涉及使用CMOS芯片进行直接带电粒子计数的方法。 为了避免复位噪声，已知使用相关双采样：对于每个信号值，像素被采样两次：在复位后直接一次（204），在积分时间后一次（206）。 然后通过从稍后获取的值中减去复位值来确定（208）信号，并且再次复位像素（202）。 通常选择的积分时间足够短，以至于两个粒子撞击一个像素的机会可以忽略不计，从而实现事件计数。 尽管此技术可消除复位噪声和固定模式噪声，但它也会将图像速率降低到帧速率的一半，因为对于一个信号值，像素需要采样两次。 本发明提出仅在大量读出之后重置像素。 这是基于以下认识：通常需要大量的事件（通常大约10次）来产生全像素。 通过在大量图像之后重置，或者当图像的一个像素显示高于预定值（例如0.8×全阱容量）的信号时，与现有技术方法相比，图像速度可以几乎加倍 ，在获取信号后使用复位。

公开(公告)号：EP2461348A1

公开(公告)日：2012-06-06

申请号：EP10193806.6

申请日：2010-12-06

申请人： FEI Company

发明人： Luecken, Uwe ,  Kooijman, Cornelis ,  Schuurmans, Frank

IPC分类号： H01J37/244 ,  H01J37/05 ,  H01J37/26

CPC分类号： H01J37/244 ,  H01J37/05 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/2802 ,  H01J2237/2817

摘要： A detector system for a transmission electron microscope includes a first detector for recording a pattern and a second detector for recording a position of a feature of the pattern. The second detector is preferably a position sensitive detector that provides accurate, rapid position information that can be used as feedback to stabilize the position of the pattern on the first detector. In one embodiment, the first detector detects an electron energy loss electron spectrum, and the second detector, positioned behind the first detector and detecting electrons that pass through the first detector, detects the position of the zero-loss peak and adjusts the electron path to stabilize the position of the spectrum on the first detector.

摘要翻译： 用于透射电子显微镜的检测器系统包括用于记录图案的第一检测器和用于记录图案的特征位置的第二检测器。 第二检测器优选地是位置敏感检测器，其提供精确，快速的位置信息，其可以用作反馈以稳定图案在第一检测器上的位置。 在一个实施例中，第一检测器检测电子能量损失电子光谱，并且位于第一检测器后面的第二检测器检测通过第一检测器的电子，检测零损耗峰值的位置并调整电子通道 稳定第一个检测器上的光谱位置。

公开(公告)号：EP2461347A1

公开(公告)日：2012-06-06

申请号：EP10193773.8

申请日：2010-12-06

申请人： FEI COMPANY

发明人： Luecken, Uwe ,  Schoenmakers, Remco ,  Schuurmans, Frank

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/222 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/2446

摘要： In a transmission electron microscope detector system, image data is read out from the pixels and analyzed during an image acquisition period. The image acquisition process is modified depending on the results of the analysis. For example, the analyses may indicate the inclusion in the data of an image artifact, such as charging or bubbling, and data including the artifact may be eliminated form the final image. CMOS detectors provide for selective read out of pixels at high data rates, allowing for real-time adaptive imaging.

摘要翻译： 在透射电子显微镜检测器系统中，图像数据从像素读出并在图像获取期间分析。 图像采集过程根据分析结果进行修改。 例如，分析可以指示在图像伪影的数据中包括诸如充电或起泡之类的图像伪影，并且可以从最终图像中消除包括伪影的数据。 CMOS检测器可在高数据速率下选择性读出像素，从而实现实时自适应成像。

公开(公告)号：EP2383769A1

公开(公告)日：2011-11-02

申请号：EP10161243.0

申请日：2010-04-28

申请人： FEI COMPANY

发明人： Luecken, Uwe ,  Van Hoften, Gerald ,  Schuurmans, Frank ,  De Jong, Alan

IPC分类号： H01J37/26 ,  H01J37/295 ,  G01N23/20 ,  H01J49/00 ,  H01J37/244 ,  H01J37/256

CPC分类号： H01J37/244 ,  H01J37/256 ,  H01J37/26 ,  H01J37/265 ,  H01J37/2955 ,  H01J2237/05 ,  H01J2237/221 ,  H01J2237/2446

摘要： The invention relates to a method of using a direct electron detector in a TEM, in which an image with a high intensity peak, such as a diffractogram or an EELS spectrum, is imaged on said detector. As known the high intensity peak may damage the detector. To avoid this damage, the centre of the image is moved, as a result of which not one position of the detector is exposed to the high intensity, but the high intensity is smeared over the detector, displacing the high intensity peak before damage results.

摘要翻译： 本发明涉及在TEM中使用直接电子检测器的方法，其中具有高强度峰值的图像（例如衍射图或EELS光谱）在所述检测器上成像。 众所周知，高强度峰值可能会损坏检测器。 为了避免这种损伤，图像的中心被移动，结果是检测器的一个位置没有暴露于高强度，但是高强度被污染在检测器上，在损坏结果之前移位高强度峰值。

公开(公告)号：EP2423943B1

公开(公告)日：2014-06-04

申请号：EP11178559.8

申请日：2011-08-24

申请人： FEI COMPANY

发明人： Luecken, Uwe ,  Kooijman, Cees ,  Schuurmans, Frank

IPC分类号： H01J37/244 ,  H01J37/05 ,  H01J37/26

CPC分类号： H01J37/244 ,  H01J37/05 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/2802 ,  H01J2237/2817

公开(公告)号：EP2423942A3

公开(公告)日：2014-01-15

申请号：EP11178366.8

申请日：2011-08-23

申请人： FEI COMPANY

发明人： Luecken, Uwe ,  Schoenmakers, Remco ,  Schuurmans, Frank

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/222 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/2446

摘要： In a transmission electron microscope detector system, image data is read out from the pixels and analyzed during an image acquisition period. The image acquisition process is modified depending on the results of the analysis. For example, the analyses may indicate the inclusion in the data of an image artifact, such as charging or bubbling, and data including the artifact may be eliminated form the final image. CMOS detectors provide for selective read out of pixels at high data rates, allowing for real-time adaptive imaging.

公开(公告)号：EP2579578A1

公开(公告)日：2013-04-10

申请号：EP12187329.3

申请日：2012-10-05

申请人： FEI COMPANY

发明人： Janssen, Bart ,  Van Hoften, Gerald ,  Luecken, Uwe

IPC分类号： H04N5/32 ,  H04N5/374 ,  H04N5/357

CPC分类号： H04N5/335 ,  H01L27/146 ,  H04N5/32 ,  H04N5/3575 ,  H04N5/374

摘要： The invention relates to a method of using a CMOS chip for direct charged particle counting. To avoid reset noise, it is known to use Correlative Double Sampling: for each signal value the pixel is sampled twice: once (204) directly after reset and once (206) after an integration time. The signal is then determined (208) by subtracting the reset value from the later acquired value, and the pixel is reset again (202). Typically the integration time is chosen sufficiently short that the chance that two particles impinge on one pixel is negligible, thereby enabling event counting.
Although this technique removes reset noise and fixed pattern noise, it also lowers the image rate to half the frame rate, as a pixel needs to be sampled twice for one signal value.
The invention proposes to reset the pixel only after a large number of read-outs. This is based on the insight that typically a large number of events, typically approximately 10, are needed to cause a full pixel. By either resetting after a large number of images, or when one pixel of the image shows a signal above a predetermined value (for example 0.8 x the full-well capacity), the image speed can be almost doubled when compared to the prior art method, using a reset after acquiring a signal.

摘要翻译： 本发明涉及使用CMOS芯片进行直接带电粒子计数的方法。 为了避免复位噪声，已知使用相关双倍采样：对于每个信号值，像素被采样两次：复位后直接（204），积分时间后一次（206）。 然后通过从稍后获取的值中减去复位值来确定（208）信号，并且再次复位像素（202）。 通常，积分时间被选择得足够短，使得两个粒子撞击在一个像素上的可能性是可忽略的，从而使事件计数。 虽然这种技术消除了复位噪声和固定模式噪声，但是由于像素需要对一个信号值进行两次采样，所以它也将图像速率降低到帧速率的一半。 本发明提出仅在大量读出之后才复位像素。 这基于通常需要大量事件（通常约10个）来引起完整像素的洞察。 通过在大量图像之后复位，或者当图像的一个像素显示高于预定值（例如0.8×全阱容量）的信号时，与现有技术方法相比，图像速度可以几乎翻倍 在获取信号后使用复位。

公开(公告)号：EP2423942A2

公开(公告)日：2012-02-29

申请号：EP11178366.8

申请日：2011-08-23

申请人： FEI COMPANY

发明人： Luecken, Uwe ,  Schoenmakers, Remco ,  Schuurmans, Frank

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/222 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/2446

摘要： In a transmission electron microscope detector system, image data is read out from the pixels and analyzed during an image acquisition period. The image acquisition process is modified depending on the results of the analysis. For example, the analyses may indicate the inclusion in the data of an image artifact, such as charging or bubbling, and data including the artifact may be eliminated form the final image. CMOS detectors provide for selective read out of pixels at high data rates, allowing for real-time adaptive imaging.

公开(公告)号：EP2063449B1

公开(公告)日：2011-04-13

申请号：EP08169468.9

申请日：2008-11-20

申请人： FEI COMPANY

发明人： Sourty, Erwan ,  Luecken, Uwe ,  Freitag, Bert ,  Yakushevska, Alevtyna

IPC分类号： H01J37/28

CPC分类号： H01J37/263 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2802 ,  H01J2237/2803 ,  H01J2237/2809

公开(公告)号：EP2738786A1

公开(公告)日：2014-06-04

申请号：EP12194825.1

申请日：2012-11-29

申请人： FEI COMPANY

发明人： Schoenmakers, Remco ,  Luecken, Uwe ,  Franken, Erik

IPC分类号： H01J37/26 ,  H01J37/21 ,  H01J37/22

CPC分类号： H01J37/22 ,  G01N23/046 ,  G01N23/2251 ,  G01N2223/418 ,  G01N2223/419 ,  H01J37/21 ,  H01J37/222 ,  H01J37/26 ,  H01J2237/21 ,  H01J2237/226 ,  H01J2237/2802

摘要： A method of performing tomographic imaging of a sample in a charged-particle microscope, comprising the following steps:
- Providing a beam of charged particles that propagate along a particle-optical axis;
- Providing the sample on a sample holder that can be tilted relative to said beam;
- In an imaging step, directing the beam through the sample so as to form and capture an image of the sample at an image detector;
- Repeating this procedure at each of a series of sample tilts so as to acquire a corresponding set of images;
- Mathematically processing images from said set so as to construct a composite image of the sample,

whereby, in said imaging step, a sequence of component images is captured at a corresponding sequence of focus settings. This renders a 3D imaging cube rather than a 2D imaging sheet at a given sample tilt.

摘要翻译： 一种在带电粒子显微镜中对样品进行断层成像的方法，包括以下步骤： - 提供沿粒子 - 光轴传播的带电粒子束; - 将样品提供在可以相对于所述梁倾斜的样品架上; - 在成像步骤中，将光束引导通过样本，以便在图像检测器处形成并捕获样本的图像; - 在一系列样品倾斜中的每一个处重复该过程，以便获取相应的一组图像; - 数学处理来自所述集合的图像，以构建样本的合成图像，由此，在所述成像步骤中，以相应的焦点设置顺序捕获分量图像序列。 这在给定的样品倾斜时呈现3D成像立方体而不是2D成像片。