发明公开
EP2452174A1 DISPOSITIF DE MESURE DE PRESSION ET SON PROCÉDÉ DE FABRICATION 审中-公开
DEVICE压力测量及其制造方法

  • 专利标题: DISPOSITIF DE MESURE DE PRESSION ET SON PROCÉDÉ DE FABRICATION
  • 专利标题(英): Device for measuring pressure, and method for manufacturing same
  • 专利标题(中): DEVICE压力测量及其制造方法
  • 申请号: EP10742200.8
    申请日: 2010-07-05
  • 公开(公告)号: EP2452174A1
    公开(公告)日: 2012-05-16
  • 发明人: LECLERC, Jacques
  • 申请人: Tronic's Microsystems
  • 申请人地址: 55, rue du Pré de l'Horme 38920 Crolles FR
  • 专利权人: Tronic's Microsystems
  • 当前专利权人: Tronic's Microsystems
  • 当前专利权人地址: 55, rue du Pré de l'Horme 38920 Crolles FR
  • 代理机构: Palix, Stéphane
  • 优先权: FR0954667 20090706; US224581P 20090710
  • 国际公布: WO2011004113 20110113
  • 主分类号: G01L9/00
  • IPC分类号: G01L9/00
DISPOSITIF DE MESURE DE PRESSION ET SON PROCÉDÉ DE FABRICATION
摘要:
The invention relates to a device for measuring pressure through the capacitive effect between two electrodes, including at least one sensitive electrode (11) spaced apart from and opposite a stationary electrode (211) so as to define a cavity (4) in which a reference pressure (Pref) exists. The device according to the invention further includes a protective housing (1) for insulating at least the stationary electrode from the ambient environment in which the pressure (P) to be measured exists, said housing (1) having at least one solid portion, forming a recess (10) for containing at least the stationary electrode (211), and a thinned portion forming the sensitive electrode (11).
信息查询
0/0