发明公开
EP2454573A1 NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS 有权
包含基于ALSI合金的换能装置的NEMS

NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS
摘要:
The invention relates to a nano electro- mechanical system (NEMS) formed on a substrate (21) and comprising at least one fixed part associated with the substrate and at least one movable part (23) in relation to the substrate, said system comprising transduction means (24) capable of exciting the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction means comprising at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, said deposition being supported at least in part by the movable part of the system.
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