发明公开
- 专利标题: NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS
- 专利标题(中): 包含基于ALSI合金的换能装置的NEMS
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申请号: EP10731526.9申请日: 2010-07-13
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公开(公告)号: EP2454573A1公开(公告)日: 2012-05-23
- 发明人: ANDREUCCI, Philippe , DURAFFOURG, Laurent , MARCOUX, Carine , BRIANCEAU, Pierre , HENTZ, Sébastien , MINORET, Stéphane , MYERS, Edward , ROUKES, Michael
- 申请人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives , California Institute of Technology
- 申请人地址: Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris FR
- 专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives,California Institute of Technology
- 当前专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives,California Institute of Technology
- 当前专利权人地址: Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris FR
- 代理机构: Ilgart, Jean-Christophe
- 优先权: FR0954998 20090717; US226419P 20090917
- 国际公布: WO2011006885 20110120
- 主分类号: G01L1/18
- IPC分类号: G01L1/18 ; B81B3/00
摘要:
The invention relates to a nano electro- mechanical system (NEMS) formed on a substrate (21) and comprising at least one fixed part associated with the substrate and at least one movable part (23) in relation to the substrate, said system comprising transduction means (24) capable of exciting the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction means comprising at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, said deposition being supported at least in part by the movable part of the system.
公开/授权文献
- EP2454573B1 NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS 公开/授权日:2013-12-04
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