发明公开
EP2472321A1 Method of preparing photoacid-generating monomer
审中-公开
Verfahren zur Herstellung einesfotosäureerzeugendenMonomers
- 专利标题： Method of preparing photoacid-generating monomer
- 专利标题（中）： Verfahren zur Herstellung einesfotosäureerzeugendenMonomers
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申请号： EP11195705.6申请日： 2011-12-23
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公开(公告)号： EP2472321A1公开(公告)日： 2012-07-04
- 发明人: Coley, Suzanne M. , Timmers, Francis J. , Wilson, David R.
- 申请人： Rohm and Haas Electronic Materials LLC , Dow Global Technologies LLC
- 申请人地址： 455 Forest Street Marlborough, MA 01752 US
- 专利权人： Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- 当前专利权人： Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- 当前专利权人地址： 455 Forest Street Marlborough, MA 01752 US
- 代理机构： Buckley, Guy Julian
- 优先权： US201013428996 20101231
- 主分类号： G03F7/004
- IPC分类号： G03F7/004 ; C07C303/32 ; C08F20/38 ; G03F7/038 ; G03F7/039 ; C07C309/12
摘要：
A method of preparing a monomer comprises reacting a sultone of the formula (I):
wherein each R is independently F, C 1-10 alkyl, fluoro-substituted C 1-10 alkyl, C 1-10 cycloalkyl, or fluoro-substituted C 1-10 cycloalkyl, provided that at least one R is F; n is an integer of from 0 to 10, and m is an integer of 1 to 4+2n, with a nucleophile having a polymerizable group. Monomers, including a photoacid-generating monomer, may be prepared by this method.
wherein each R is independently F, C 1-10 alkyl, fluoro-substituted C 1-10 alkyl, C 1-10 cycloalkyl, or fluoro-substituted C 1-10 cycloalkyl, provided that at least one R is F; n is an integer of from 0 to 10, and m is an integer of 1 to 4+2n, with a nucleophile having a polymerizable group. Monomers, including a photoacid-generating monomer, may be prepared by this method.
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