发明公开
EP2567939A3 Method of determining an amount of impurities that a contaminating material contributes to high purity silicon and furnace for treating high purity silicon
审中-公开
为高纯度硅的治疗测定的杂质,这是与一个污染材料对高纯硅一起加入的方法,和炉
- 专利标题: Method of determining an amount of impurities that a contaminating material contributes to high purity silicon and furnace for treating high purity silicon
- 专利标题(中): 为高纯度硅的治疗测定的杂质,这是与一个污染材料对高纯硅一起加入的方法,和炉
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申请号: EP12195527.2申请日: 2009-09-24
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公开(公告)号: EP2567939A3公开(公告)日: 2014-07-09
- 发明人: Depesa, Dennis , Host, Jon , Houthoofd, Troy , Rytlewski, Alan
- 申请人: Hemlock Semiconductor Corporation
- 申请人地址: 12334 Geddes Road Hemlock, MI 48626 US
- 专利权人: Hemlock Semiconductor Corporation
- 当前专利权人: Hemlock Semiconductor Corporation
- 当前专利权人地址: 12334 Geddes Road Hemlock, MI 48626 US
- 代理机构: Neilson, Martin Mark
- 优先权: US101654P 20080930
- 主分类号: C01B33/037
- IPC分类号: C01B33/037 ; C01B33/021 ; C30B29/06 ; C30B35/00 ; F27D1/00 ; F27B11/00 ; F27B17/00 ; F27D3/12 ; C30B33/02 ; F27D19/00
摘要:
A method of determining an amount of impurities that a contaminating material contributes to high purity silicon comprises the step of partially encasing a sample of high purity silicon in the contaminating material. The sample encased in the contaminating material is heated within a furnace. A change in impurity content of the high purity silicon is determined after the step of heating, compared to an impurity content of the high purity silicon prior to the step of heating. A furnace for heat treating high purity silicon comprises a housing that defines a heating chamber. The housing is at least partially formed from low contaminant material that contributes less than 400 parts per trillion of impurities to the high purity silicon during heating at annealing temperatures for a sufficient period time to anneal the high purity silicon, and the furnace contributes an average of less than 400 parts per trillion of impurities to the high purity silicon under the same heating conditions.
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