发明公开
EP2587515A1 Inspection system by charged particle beam and method of manufacturing devices using the system
审中-公开
通过带电粒子的束，并使用该系统的制造装置的方法的测试系统
- 专利标题： Inspection system by charged particle beam and method of manufacturing devices using the system
- 专利标题（中）： 通过带电粒子的束，并使用该系统的制造装置的方法的测试系统
-
申请号： EP13000328.8申请日： 2001-06-27
-
公开(公告)号： EP2587515A1公开(公告)日： 2013-05-01
- 发明人: Nakasuji, Mamoru , Noji, Nobuharu , Satake, Tohru , Hatakeyama, Masahiro , Kimba, Toshifumi , Sobukawa, Hirosi , Yoshikawa, Shoji , Murakami, Takeshi , Watanabe, Kenji , Karimata, Tsutomu , Oowada, Shin , Saito, Mutsumi , Yamazaki, Yuichiro , Nagai, Takamitsu , Nagahama, Ichirota
- 申请人： EBARA CORPORATION , Kabushiki Kaisha Toshiba
- 申请人地址： 11-1, Haneda Asahi-cho Ohta-ku, Tokyo JP
- 专利权人： EBARA CORPORATION,Kabushiki Kaisha Toshiba
- 当前专利权人： EBARA CORPORATION,Kabushiki Kaisha Toshiba
- 当前专利权人地址： 11-1, Haneda Asahi-cho Ohta-ku, Tokyo JP
- 代理机构： Klang, Alexander H.
- 优先权： JP2000193104 20000627; JP2000229101 20000728; JP2000335934 20001102; JP2001011218 20010119; JP2001031901 20010208; JP2001031906 20010208; JP2001033599 20010209; JP2001035069 20010213; JP2001158662 20010528; JP2001162041 20010530; JP2001189304 20010622
- 主分类号： H01J37/063
- IPC分类号： H01J37/063 ; H01J37/29 ; H01L21/027 ; H01L21/66 ; G03F1/86
摘要：
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; ; and a loader 60 for transferring the object to the stage system through the loading chambers.
信息查询
