发明公开
- 专利标题： Cooled charged particle systems and methods
- 专利标题（中）： 冷却带电粒子的系统和方法
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申请号： EP13001553.0申请日： 2010-06-14
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公开(公告)号： EP2610888A3公开(公告)日： 2014-12-17
- 发明人: McVey, Shawn , Dimanna, Mark , Bassett, Brian , Comunale, Richard , Barriss, Louise , Sanford, A. Colin , Notte, A. John , Groholski, Alexander
- 申请人： Carl Zeiss Microscopy, LLC
- 申请人地址： One Zeiss Drive Thornwood, NY 10594 US
- 专利权人： Carl Zeiss Microscopy, LLC
- 当前专利权人： Carl Zeiss Microscopy, LLC
- 当前专利权人地址： One Zeiss Drive Thornwood, NY 10594 US
- 代理机构： Carl Zeiss AG - Patentabteilung
- 优先权： US218282P 20090618
- 主分类号： H01J37/08
- IPC分类号： H01J37/08 ; H01J37/02 ; F25D3/12 ; H01J37/28
摘要：
Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.
公开/授权文献
- EP2610888B1 Cooled charged particle systems and methods 公开/授权日：2016-11-02
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