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公开(公告)号：EP2610888A3
公开(公告)日：2014-12-17
申请号：EP13001553.0
申请日：2010-06-14
发明人： McVey, Shawn , Dimanna, Mark , Bassett, Brian , Comunale, Richard , Barriss, Louise , Sanford, A. Colin , Notte, A. John , Groholski, Alexander
CPC分类号： F17C13/02 , F25D3/12 , F25D19/006 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0807 , H01J2237/2001
摘要： Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.
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公开(公告)号：EP2610888B1
公开(公告)日：2016-11-02
申请号：EP13001553.0
申请日：2010-06-14
发明人： McVey, Shawn , Dimanna, Mark , Bassett, Brian , Comunale, Richard , Barriss, Louise , Sanford, A. Colin , Notte, A. John , Groholski, Alexander
CPC分类号： F17C13/02 , F25D3/12 , F25D19/006 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0807 , H01J2237/2001
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3.发明公开
公开(公告)号：EP2610888A2
公开(公告)日：2013-07-03
申请号：EP13001553.0
申请日：2010-06-14
发明人： McVey, Shawn , Dimanna, Mark , Bassett, Brian , Comunale, Richard , Barriss, Louise , Sanford, A. Colin , Notte, A. John , Groholski, Alexander
CPC分类号： F17C13/02 , F25D3/12 , F25D19/006 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0807 , H01J2237/2001
摘要： Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.
摘要翻译： 公开了冷却的带电粒子源和方法。 在一些实施方案中，带电粒子源与固体冷冻剂如固体氮热偶合。 热耦合可以设计成提供良好的导热性，以将带电粒子源保持在期望的低温。
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