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公开(公告)号：EP2416343B1
公开(公告)日：2019-01-02
申请号：EP11182566.7
申请日：2006-11-15
发明人： Mantz, Ulrich , Steigerwald, Michael , Ward, Billy W. , Notte, John A. , Farkas, Louis , Percival, Randall , Hill, Raymond
IPC分类号： H01J37/28 , H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317 , B81B1/00 , H01J27/26 , B82Y10/00 , H01J37/20
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公开(公告)号：EP2610888A3
公开(公告)日：2014-12-17
申请号：EP13001553.0
申请日：2010-06-14
发明人： McVey, Shawn , Dimanna, Mark , Bassett, Brian , Comunale, Richard , Barriss, Louise , Sanford, A. Colin , Notte, A. John , Groholski, Alexander
CPC分类号： F17C13/02 , F25D3/12 , F25D19/006 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0807 , H01J2237/2001
摘要： Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.
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公开(公告)号：EP2418674B1
公开(公告)日：2019-03-13
申请号：EP11183114.5
申请日：2006-11-15
发明人： Markwort, Lars , Aderhold, Dirk , Ward, Billy W. , Notte, John A. , Farkas, Louis , Percival, Randall , Hill, Raymond
IPC分类号： H01J37/28 , H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317 , B81B1/00 , G01N23/225 , H01J27/26 , H01J37/20
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公开(公告)号：EP1955350B1
公开(公告)日：2018-07-25
申请号：EP06837699.5
申请日：2006-11-15
发明人： WARD, Billy, W. , NOTTE IV, John, A. , FARKAS III, Louis, S. , PERCIVAL, Randall, G. , HILL, Raymond
IPC分类号： H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J27/26 , H01J37/317 , B81B1/00 , G01N23/225
CPC分类号： H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).
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公开(公告)号：EP2433293B1
公开(公告)日：2013-09-04
申请号：EP10719574.5
申请日：2010-05-04
发明人： WARD, Billy, W.
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2811 , H01J2237/2823 , H01J2237/30416
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公开(公告)号：EP1974365B1
公开(公告)日：2019-08-21
申请号：EP06837732.4
申请日：2006-11-15
发明人： WARD, Billy W. , NOTTE IV, John A. , FARKAS III, Louis, S. , PERCIVAL, Randall G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard , MCVEY, Shawn , BIHR, Johannes
IPC分类号： H01J37/08 , H01J9/02 , H01J37/28 , H01J37/252 , H01J37/20 , H01J37/305 , H01J37/317
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公开(公告)号：EP1955351B1
公开(公告)日：2019-08-21
申请号：EP06837735.7
申请日：2006-11-15
发明人： WARD, Billy W. , NOTTE IV, John A. , FARKAS III, Louis, S. , PERCIVAL, Randall G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard
IPC分类号： H01J37/20 , H01J37/08 , H01J9/02 , H01J37/252 , H01J37/28 , H01J37/305 , H01J37/317
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公开(公告)号：EP2331946B1
公开(公告)日：2018-12-26
申请号：EP09791973.2
申请日：2009-08-27
CPC分类号： H01J37/28 , H01J37/05 , H01J37/08 , H01J37/265 , H01J2237/057 , H01J2237/0807 , H01J2237/24514
摘要： Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
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公开(公告)号：EP2416344B1
公开(公告)日：2017-03-08
申请号：EP11183110.3
申请日：2006-11-15
发明人： Edinger, Klaus , Markwort, Lars , Mantz, Ulrich , Ward, Billy W. , Notte, John A. , Farkas, Louis , Percival, Randall , Hill, Raymond , Aderhold, Dirk
IPC分类号： H01J37/28 , H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317 , B82Y10/00 , H01J27/26 , B82Y40/00 , H01J37/20
CPC分类号： H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
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公开(公告)号：EP2610888B1
公开(公告)日：2016-11-02
申请号：EP13001553.0
申请日：2010-06-14
发明人： McVey, Shawn , Dimanna, Mark , Bassett, Brian , Comunale, Richard , Barriss, Louise , Sanford, A. Colin , Notte, A. John , Groholski, Alexander
CPC分类号： F17C13/02 , F25D3/12 , F25D19/006 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0807 , H01J2237/2001
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