发明公开
EP2619797A4 NON-PLANAR DEVICE HAVING UNIAXIALLY STRAINED FIN AND METHOD OF MAKING SAME
审中-公开
单轴非平面器件WRAPPED FIN及其制备方法
- 专利标题： NON-PLANAR DEVICE HAVING UNIAXIALLY STRAINED FIN AND METHOD OF MAKING SAME
- 专利标题（中）： 单轴非平面器件WRAPPED FIN及其制备方法
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申请号： EP11827279申请日： 2011-09-19
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公开(公告)号： EP2619797A4公开(公告)日： 2016-04-06
- 发明人: CEA STEPHEN M , KOTLYAR ROZA , KAVALIEROS JACK T , GILES MARTIN D , GHANI TAHIR , KUHN KELIN J , KUHN MARKUS , ZELICK NANCY M
- 申请人： INTEL CORP
- 专利权人： INTEL CORP
- 当前专利权人： INTEL CORP
- 优先权： US92423210 2010-09-23
- 主分类号： H01L29/78
- IPC分类号： H01L29/78 ; H01L21/336 ; H01L29/10
摘要：
A method and a device made according to the method. The method comprises providing a substrate including a first material, and providing a fin including a second material, the fin being disposed on the substrate and having a device active portion, the first material and the second material presenting a lattice mismatch between respective crystalline structures thereof. Providing the fin includes providing a biaxially strained film including the second material on the substrate; and removing parts of the biaxially strained film to form a substantially uniaxially strained fin therefrom.
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