发明公开
EP2634796A2 Semiconductor device and manufacturing method thereof
审中-公开
Halbleiterbauelement und Herstellungsverfahrendafür
- 专利标题: Semiconductor device and manufacturing method thereof
- 专利标题(中): Halbleiterbauelement und Herstellungsverfahrendafür
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申请号: EP12189403.4申请日: 2012-10-22
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公开(公告)号: EP2634796A2公开(公告)日: 2013-09-04
- 发明人: Sawachi, Shigenori , Yamagata, Osamu , Inoue, Hiroshi , Itakura, Satoru , Chikai, Tomoshige , Hori, Masahiko , Katsumata, Akio
- 申请人: J-Devices Corporation
- 申请人地址: 1913-2, Fukura Usuki-shi, Oita JP
- 专利权人: J-Devices Corporation
- 当前专利权人: J-Devices Corporation
- 当前专利权人地址: 1913-2, Fukura Usuki-shi, Oita JP
- 代理机构: Schwabe - Sandmair - Marx
- 优先权: JP2012025042 20120208
- 主分类号: H01L21/98
- IPC分类号: H01L21/98 ; H01L25/065
摘要:
A semiconductor device, comprising: a semiconductor element; a support substrate (1); an insulating material layer (4) for sealing the semiconductor element (2a, 2b) and a periphery thereof; a metal thin film wiring layer provided in the insulating material layer (4), with a part thereof being exposed on an external surface; and metal vias (9) provided in the insulating material layer (4) and electrically connected to the metal thin film wiring layer, wherein the semiconductor element (2a, 2b) is provided in a plurality, and the respective semiconductor elements (2a, 2b) are stacked via an insulating material (4) such that a circuit surface of each semiconductor element (2a, 2b) faces the metal thin film wiring layer, and electrode pads of each semiconductor element (2a) are exposed without being hidden by the semiconductor element (2b) stacked thereabove, and electrically connected to the metal thin film wiring layer. The semiconductor device can be manufactured in a smaller and thinner size and the number of manufacturing steps can be reduced by causing a plurality of semiconductor chips to be a vertically-stacked structure.
公开/授权文献
- EP2634796B1 Semiconductor device and manufacturing method thereof 公开/授权日:2020-04-08
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