Invention Publication
EP2690782A4 PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD FOR PIEZOELECTRIC DEVICE
审中-公开
压电器件及其制造方法的压电装置
- Patent Title: PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD FOR PIEZOELECTRIC DEVICE
- Patent Title (中): 压电器件及其制造方法的压电装置
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Application No.: EP12759963Application Date: 2012-03-21
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Publication No.: EP2690782A4Publication Date: 2014-08-20
- Inventor: ITO KOREKIYO , IWAMOTO TAKASHI
- Applicant: MURATA MANUFACTURING CO
- Assignee: MURATA MANUFACTURING CO
- Current Assignee: MURATA MANUFACTURING CO
- Priority: JP2011062315 2011-03-22
- Main IPC: H03H3/08
- IPC: H03H3/08 ; H01L41/187 ; H01L41/33 ; H03H9/02 ; H03H9/145
Abstract:
Provided are a piezoelectric device that allows for an improvement in the power durability of an electrode formed on a piezoelectric thin film and a significant reduction in etchant concentration or etching time and a method for manufacturing such a piezoelectric device. Among a +C plane (22) on the +Z axis side of a piezoelectric thin film (20) and a -C plane (12) on the -Z axis side of the piezoelectric thin film (20), the -C plane (12) on the -Z axis side of the piezoelectric thin film (20) is etched. Thus, -Z planes (21) of the piezoelectric thin film (20) on which epitaxial growth is possible are exposed. Ti is epitaxially grown on the -Z planes (21) of the piezoelectric thin film (20) in the -Z axis direction such that the crystal growth plane thereof is parallel to the -Z planes (21) of the piezoelectric thin film (20). Al is then epitaxially grown on the surface of the Ti electrode (65) in the -Z axis direction such that the crystal growth plane thereof is parallel to the -Z planes (21) of the piezoelectric thin film (20).
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