发明公开
EP2702603A2 METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FO-CUSSED PARTICLE BEAM
审中-公开
方法和装置用于处理基板用聚焦粒子束
- 专利标题： METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FO-CUSSED PARTICLE BEAM
- 专利标题（中）： 方法和装置用于处理基板用聚焦粒子束
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申请号： EP12718639.3申请日： 2012-04-26
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公开(公告)号： EP2702603A2公开(公告)日： 2014-03-05
- 发明人: BRET, Tristan , SPIES, Petra , HOFMANN, Thorsten
- 申请人： Carl Zeiss SMS GmbH
- 申请人地址： Carl-Zeiss-Promenade 10 07745 Jena DE
- 专利权人： Carl Zeiss SMS GmbH
- 当前专利权人： Carl Zeiss SMS GmbH
- 当前专利权人地址： Carl-Zeiss-Promenade 10 07745 Jena DE
- 代理机构： Wegner, Hans
- 优先权： US201161479018P 20110426
- 国际公布： WO2012146647 20121101
- 主分类号： H01J37/304
- IPC分类号： H01J37/304 ; H01J37/305 ; G03F1/74
摘要：
The invention relates to a method for processing a substrate with a focussed particle beam which incidents on the substrate, the method comprising the steps of: (a) generating at least one reference mark on the substrate using the focused particle beam and at least one processing gas, (b) determining a reference position of the at least one reference mark, (c) processing the substrate using the reference position of the reference mark, and (d) removing the at least one reference mark from the substrate.
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