发明公开
EP2742570A4 LASER WITH HIGH QUALITY, STABLE OUTPUT BEAM, AND LONG LIFE HIGH CONVERSION EFFICIENCY NON-LINEAR CRYSTAL
审中-公开
以高品质和稳定的输出光束耐用非线性晶体转换效率高LASER
- 专利标题: LASER WITH HIGH QUALITY, STABLE OUTPUT BEAM, AND LONG LIFE HIGH CONVERSION EFFICIENCY NON-LINEAR CRYSTAL
- 专利标题(中): 以高品质和稳定的输出光束耐用非线性晶体转换效率高LASER
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申请号: EP12816820申请日: 2012-06-28
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公开(公告)号: EP2742570A4公开(公告)日: 2015-06-03
- 发明人: DRIBINSKI VLADIMIR , CHUANG YUNG-HO ALEX , ARMSTRONG JOSEPH J , FIELDEN JOHN
- 申请人: KLA TENCOR CORP
- 专利权人: KLA TENCOR CORP
- 当前专利权人: KLA TENCOR CORP
- 优先权: US201161510633 2011-07-22
- 主分类号: H01S3/098
- IPC分类号: H01S3/098 ; G01N21/88 ; G02F1/37 ; H01S3/109
摘要:
A mode-locked laser system operable at low temperature can include an annealed, frequency-conversion crystal and a housing to maintain an annealed condition of the crystal during standard operation at the low temperature. In one embodiment, the crystal can have an increased length. First beam shaping optics can be configured to focus a beam from a light source to an elliptical cross section at a beam waist located in or proximate to the crystal. A harmonic separation block can divide an output from the crystal into beams of different frequencies separated in space. In one embodiment, the mode-locked laser system can further include second beam shaping optics configured to convert an elliptical cross section of the desired frequency beam into a beam with a desired aspect ratio, such as a circular cross section.
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