发明公开
- 专利标题: NONCONTACT CONVEYANCE DEVICE
- 专利标题(中): 非接触式输送机
-
申请号: EP12825546申请日: 2012-08-24
-
公开(公告)号: EP2750175A4公开(公告)日: 2015-03-25
- 发明人: IWASAKA HITOSHI , TOKUNAGA HIDEYUKI , KOSHIISHI KATSUHIRO
- 申请人: HARMOTEC CO LTD
- 专利权人: HARMOTEC CO LTD
- 当前专利权人: HARMOTEC CO LTD
- 优先权: JP2011182978 2011-08-24
- 主分类号: H01L21/677
- IPC分类号: H01L21/677 ; B65G49/07
摘要:
The object of the present invention is to suppress rotation of a plate-like member, which is caused when the plate-like member is conveyed in a non-contacting manner. Non-contacting conveyance equipment for conveying a plate-like member in a non-contacting manner comprises a plate-like base body and a plurality of swirl flow-forming bodies provided at the base body. Each of the plurality of swirl flow-forming bodies includes a column-shaped main body, a cylindrical chamber formed inside the main body, that has an opening at one end, a flat end face formed at a surface of the main body, in which the cylindrical chamber is opened, a jetting port provided at an inner circumferential surface of the cylindrical chamber, a fluid introduction port provided at an outer circumferential surface of the main body, and a fluid passage that connects the fluid introduction port to the jetting port. The fluid passage is arranged so that a direction in which a fluid flows out of the cylindrical chamber along the end face is substantially parallel to a line that extends from a center of gravity of the plate-like member being conveyed, toward an outer circumference of the plate-like member.
信息查询
IPC分类: