发明公开
- 专利标题: LONISATIONS - VAKUUMMESSZELLE
- 专利标题(英): Ionization vacuum measuring cell
- 专利标题(中): 电离 - 真空测量计
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申请号: EP12748149.7申请日: 2012-08-02
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公开(公告)号: EP2753907A1公开(公告)日: 2014-07-16
- 发明人: ANDREAUS, Bernhard
- 申请人: Inficon GmbH
- 申请人地址: Hintergasse 15B 7310 Bad Ragaz CH
- 专利权人: Inficon GmbH
- 当前专利权人: Inficon GmbH
- 当前专利权人地址: Hintergasse 15B 7310 Bad Ragaz CH
- 代理机构: Troesch Scheidegger Werner AG
- 优先权: CH14832011 20110908
- 国际公布: WO2013033851 20130314
- 主分类号: G01L21/34
- IPC分类号: G01L21/34 ; H01J41/06
摘要:
The invention relates to an ionization vacuum measuring cell comprising: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between said two electrodes, said measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring means (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and comprises a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1). The yoke (2) extends axially away from the permanent magnet ring (1) on both sides and radially towards the axis (7) and the first electrode (3) on both sides after a specified distance (d) from the permanent magnet ring (1) such that the yoke (2) forms two annular poles (9a, b) on both sides at a distance from the permanent magnet ring (1), via which at least some of the field lines of the permanent magnet ring (1) form a closed loop within the measuring chamber (20), penetrating the first electrode (3).
公开/授权文献
- EP2753907B1 LONISATIONS - VAKUUMMESSZELLE 公开/授权日:2015-10-21
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