发明公开
EP2780489A1 VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM FOR MATERIAL CO-DEPOSITION
审中-公开
用于材料共沉积的蒸气传输沉积方法和系统
- 专利标题： VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM FOR MATERIAL CO-DEPOSITION
- 专利标题（中）： 用于材料共沉积的蒸气传输沉积方法和系统
-
申请号： EP12787623.3申请日： 2012-11-07
-
公开(公告)号： EP2780489A1公开(公告)日： 2014-09-24
- 发明人: BARDEN, John , POWELL, Rick, C.
- 申请人： First Solar, Inc
- 申请人地址： 28101 Cedar Park Boulevard Perrysburg, OH 43551 US
- 专利权人： First Solar, Inc
- 当前专利权人： First Solar, Inc
- 当前专利权人地址： 28101 Cedar Park Boulevard Perrysburg, OH 43551 US
- 代理机构： Dearden, Anthony James
- 优先权： US201161561691P 20111118
- 国际公布： WO2013074345 20130523
- 主分类号： C23C14/24
- IPC分类号： C23C14/24 ; C23C14/22 ; C03C17/00 ; C23C14/56 ; H01L31/18
摘要：
An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
公开/授权文献
信息查询
IPC分类:
