公开(公告)号：EP2780489A1

公开(公告)日：2014-09-24

申请号：EP12787623.3

申请日：2012-11-07

申请人： First Solar, Inc

发明人： BARDEN, John ,  POWELL, Rick, C.

IPC分类号： C23C14/24 ,  C23C14/22 ,  C03C17/00 ,  C23C14/56 ,  H01L31/18

CPC分类号： H01L31/1828 ,  C23C14/228 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C16/448 ,  H01L21/02557 ,  H01L21/02562 ,  H01L31/02963 ,  H01L31/046 ,  Y02E10/543 ,  Y02P70/521

摘要： An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.

摘要翻译： 一种用于连续气相传输沉积的改进的进料器系统和方法，其包括至少两个蒸发器通过改进的密封件连接到共同分配器，用于分离地蒸发和收集至少任何两种可蒸发材料以沉积为基底上的材料层。 多个蒸发器提供冗余，并允许在蒸发器维护和修理期间连续沉积。

公开(公告)号：EP3824112A1

公开(公告)日：2021-05-26

申请号：EP19765576.4

申请日：2019-08-09

申请人： First Solar, Inc.

发明人： BARDEN, John ,  POWELL, Rick ,  ROGGELIN, Aaron ,  VORA, Nirav

IPC分类号： C23C14/24 ,  C23C14/26 ,  C23C14/56 ,  C23C14/22 ,  C23C16/448 ,  H01L31/18

公开(公告)号：EP2809822A1

公开(公告)日：2014-12-10

申请号：EP13702873.4

申请日：2013-01-29

申请人： First Solar, Inc

发明人： XIONG, Gang ,  BARDEN, John ,  POWELL, Rick, C. ,  JIN, Changming ,  LIAO, Feng

IPC分类号： C23C14/02 ,  C23C14/06 ,  C23C14/22 ,  C23C14/58 ,  H01L21/365 ,  H01L31/032

CPC分类号： H01L31/18 ,  C23C14/024 ,  C23C14/0629 ,  C23C14/228 ,  C23C14/58 ,  H01L21/67173 ,  H01L21/6776 ,  H01L31/1828 ,  Y02E10/543 ,  Y02P70/521

摘要： A vapor transport deposition system and method that includes a vaporizer and distributor unit ant at least one auxiliary process unit for integrating thin-film layer deposition with one or more pre-or post-deposition processes.

公开(公告)号：EP2803078A1

公开(公告)日：2014-11-19

申请号：EP13700831.4

申请日：2013-01-11

申请人： First Solar, Inc

发明人： XIONG, Gang ,  POWELL, Rick, C. ,  PENG, Xilin ,  BARDEN, John ,  ALLENIC, Arnold ,  LIAO, Feng ,  RING, Kenneth, M.

IPC分类号： H01L21/02 ,  H01L21/365

CPC分类号： H01L31/18 ,  C23C16/28 ,  C23C16/40 ,  C23C16/402 ,  C23C16/407 ,  C23C16/4488 ,  C23C16/455 ,  C23C16/483 ,  C23C16/52 ,  H01J37/3476 ,  H01J2237/332 ,  H01L21/02551 ,  H01L21/02568 ,  H01L21/02573 ,  H01L21/0262 ,  H01L31/02963 ,  H01L31/073 ,  Y02E10/543

摘要： A method and system for controlling the amount of a second material incorporated into a first material by controlling the amount of a third material which can interact with the second material.

公开(公告)号：EP2764131A1

公开(公告)日：2014-08-13

申请号：EP12775401.8

申请日：2012-10-02

申请人： First Solar, Inc

发明人： XIONG, Gang ,  BARDEN, John

IPC分类号： C23C14/24 ,  C23C16/455 ,  C23C14/06

CPC分类号： C23C14/246 ,  C23C14/0629 ,  C23C14/228 ,  C23C16/45568

摘要： An improved feeder system and method for vapor transport deposition that includes at least two vaporizers couple to a common distributor for vaporizing and co-depositing at least any two vaporizable materials as a material layer on a substrate. Composition of the material layer can be controlled by changing the flow of vapors from the respective vaporizers into the distributor to adjust the proportion of respective vapors in the combined vapor prior to deposition. Flow of the vapors from the respective vaporizers into the distributor may be controlled by adjusting the flow of carrier gas transporting the raw material into the vaporizer and/or by adjusting the vibration speed and/or amplitude of the powder feeders that process the raw material.

公开(公告)号：EP4043609A1

公开(公告)日：2022-08-17

申请号：EP22158332.1

申请日：2019-08-09

申请人： First Solar, Inc.

发明人： BARDEN, John ,  POWELL, Rick ,  ROGGELIN, Aaron ,  VORA, Nirav

IPC分类号： C23C14/24 ,  C23C14/26 ,  C23C14/56 ,  C23C14/22 ,  C23C16/448 ,  H01L31/18

摘要： Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.

公开(公告)号：EP2780489B1

公开(公告)日：2019-01-09

申请号：EP12787623.3

申请日：2012-11-07

申请人： First Solar, Inc

发明人： BARDEN, John ,  POWELL, Rick, C.

IPC分类号： C23C14/24 ,  C23C14/22 ,  C23C14/56 ,  C03C17/00 ,  H01L31/18

公开(公告)号：EP2885810A1

公开(公告)日：2015-06-24

申请号：EP13753467.3

申请日：2013-08-14

申请人： First Solar, Inc

发明人： ALLENIC, Arnold ,  BAN, Zhigang ,  BARDEN, John ,  MILLIRON, Benjamin ,  POWELL, Rick, C.

IPC分类号： H01L21/36 ,  H01L21/02 ,  C23C14/22 ,  C23C14/24

CPC分类号： H01L31/1828 ,  C23C14/0629 ,  C23C14/228 ,  C23C14/243 ,  C23C14/246 ,  H01L21/02557 ,  H01L21/02562 ,  H01L21/0257 ,  H01L21/02573 ,  H01L21/02581 ,  H01L21/02617 ,  H01L21/02631 ,  H01L31/02963

摘要： A multi-stage method and apparatus for vaporizing and depositing a tellurium containing semiconductor material on a substrate.

摘要翻译： 用于蒸发和沉积碲上的衬底包含半导体材料的多级方法和设备。