发明公开
EP2811260A1 Method and structure of an integrated mems inertial sensor device using electrostatic quadrature-cancellation
审中-公开
具有静电抑制正交集成MEMS惯性传感器装置的方法和结构
- 专利标题： Method and structure of an integrated mems inertial sensor device using electrostatic quadrature-cancellation
- 专利标题（中）： 具有静电抑制正交集成MEMS惯性传感器装置的方法和结构
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申请号： EP14171673.8申请日： 2014-06-09
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公开(公告)号： EP2811260A1公开(公告)日： 2014-12-10
- 发明人: Yoneoka, Shingo , Sridharamurthy, Sudheer , Zhang, Wenhua , Lee, Te-Hsi
- 申请人： MCube, Inc.
- 申请人地址： 2570 N. 1st Street, Suite 300 San Jose, CA 95131 US
- 专利权人： MCube, Inc.
- 当前专利权人： MCube, Inc.
- 当前专利权人地址： 2570 N. 1st Street, Suite 300 San Jose, CA 95131 US
- 代理机构： Clark, Jane Anne
- 优先权： US201361832657P 20130607; US201414297337 20140605
- 主分类号： G01C19/5719
- IPC分类号： G01C19/5719 ; G01P15/125
摘要：
An integrated MEMS inertial sensor device is described. The device includes a MEMS inertial sensor overlying a CMOS substrate. The MEMS inertial sensor includes a drive frame coupled to the surface region via at least one drive spring, a sense mass coupled to the drive frame via at least a sense spring, and a sense electrode disposed underlying the sense mass. The device also includes at least one pair of quadrature cancellation electrodes disposed within a vicinity of the sense electrode, wherein each pair includes an N-electrode and a P-electrode.
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