发明公开
EP2818905A2 Spatial frequency reproducing method and optical distance measuring apparatus 审中-公开
Raumfrequenzwiedergabeverfahren und optische Distanzmessvorrichtung

Spatial frequency reproducing method and optical distance measuring apparatus
摘要:
An optical distance measuring apparatus for irradiating a luminous flux so as to measure an object under measurement, characterized in that it includes: a separating element (38) dividing into two luminous fluxes a luminous flux generated by diffraction by the object under measurement and including a zero order diffracted light and a first order diffracted light; a first delay element (43A) delaying advancing of a luminous flux of a portion of the diffracted lights constituting one of the luminous fluxes; a first photo detector (40) detecting two divided portions of the zero order diffracted light and the first order diffracted light, which are partially delayed, in a state of being made to interfere with each other; a second delay element (43B, 43C) delaying advancing of a luminous flux of a portion of the diffracted lights constituting another one of the luminous fluxes divided; a second photo detector (50) detecting two divided portions of the zero order diffracted light and the first order diffracted light, which are partially delayed, in a state of being made to interfere with each other; and an output summation/difference detection unit (7, 8) detecting an output value of a sum or a difference of electrical signals of two types of light receiving outputs which are detected with phases being made different from each other by the first photo detector (40) and electrical signals of two types of light receiving outputs which are detected with phases being made different from each other by the second photo detector (50).
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