摘要:
A distance measurement system for modulating a light emitted from a light source (21), which emits a coherent light, into frequencies different from each other to measure an object under measurement, characterized in that it includes: a first means (23) for modulating the light emitted from the light source (21) into two lights which have frequencies different from each other and are irradiated separately adjacent to each other; a second means (26) for one-dimensionally or two-dimensionally scanning the two lights; a third means (31) for irradiating an object under measurement with the two lights which are two-dimensionally scanned; a fourth means (29) for receiving at least two or more divided reflected lights or transmitted lights from the object under measurement with a boundary line being interposed therebetween in a direction substantially perpendicular to the direction in which the two lights are separated; a fifth means (33) for generating a difference signal or a summation signal of respective outputs of the lights received by the fourth means (29) in areas with the boundary line being interposed therebetween; and a sixth means (34) for obtaining a phase difference or an intensity difference of the difference signal or the summation signal to obtain a measurement value.
摘要:
An optical distance measuring apparatus measuring an object under measurement by sending an irradiation light to the object under measurement, characterized in that it includes: a scanning element (26) scanning a coherent irradiation light from a light source (21) and sending it to the object under measurement; a photo detector (29) receiving the irradiation light modulated by being passed through the object under measurement in accordance with the scanning, and performing photoelectric conversion on the irradiation light; and a measuring unit (33, 34) obtaining phase information of the object under measurement based on a signal photoelectrically converted by the photo detector (29) and a signal to be a reference for the scanning by the scanning element (26), and obtaining a measurement value regarding the object under measurement based on the phase information.
摘要:
An optical distance measuring apparatus for irradiating a luminous flux so as to measure an object under measurement, characterized in that it includes: a separating element (38) dividing into two luminous fluxes a luminous flux generated by diffraction by the object under measurement and including a zero order diffracted light and a first order diffracted light; a first delay element (43A) delaying advancing of a luminous flux of a portion of the diffracted lights constituting one of the luminous fluxes; a first photo detector (40) detecting two divided portions of the zero order diffracted light and the first order diffracted light, which are partially delayed, in a state of being made to interfere with each other; a second delay element (43B, 43C) delaying advancing of a luminous flux of a portion of the diffracted lights constituting another one of the luminous fluxes divided; a second photo detector (50) detecting two divided portions of the zero order diffracted light and the first order diffracted light, which are partially delayed, in a state of being made to interfere with each other; and an output summation/difference detection unit (7, 8) detecting an output value of a sum or a difference of electrical signals of two types of light receiving outputs which are detected with phases being made different from each other by the first photo detector (40) and electrical signals of two types of light receiving outputs which are detected with phases being made different from each other by the second photo detector (50).
摘要:
An optical distance measuring apparatus for irradiating a luminous flux so as to measure an object under measurement, characterized in that it includes: a separating element (38) dividing into two luminous fluxes a luminous flux generated by diffraction by the object under measurement and including a zero order diffracted light and a first order diffracted light; a first delay element (43A) delaying advancing of a luminous flux of a portion of the diffracted lights constituting one of the luminous fluxes; a first photo detector (40) detecting two divided portions of the zero order diffracted light and the first order diffracted light, which are partially delayed, in a state of being made to interfere with each other; a second delay element (43B, 43C) delaying advancing of a luminous flux of a portion of the diffracted lights constituting another one of the luminous fluxes divided; a second photo detector (50) detecting two divided portions of the zero order diffracted light and the first order diffracted light, which are partially delayed, in a state of being made to interfere with each other; and an output summation/difference detection unit (7, 8) detecting an output value of a sum or a difference of electrical signals of two types of light receiving outputs which are detected with phases being made different from each other by the first photo detector (40) and electrical signals of two types of light receiving outputs which are detected with phases being made different from each other by the second photo detector (50).
摘要:
A distance measurement system for modulating a light emitted from a light source (21), which emits a coherent light, into frequencies different from each other to measure an object under measurement, characterized in that it includes: a first means (23) for modulating the light emitted from the light source (21) into two lights which have frequencies different from each other and are irradiated separately adjacent to each other; a second means (26) for one-dimensionally or two-dimensionally scanning the two lights; a third means (31) for irradiating an object under measurement with the two lights which are two-dimensionally scanned; a fourth means (29) for receiving at least two or more divided reflected lights or transmitted lights from the object under measurement with a boundary line being interposed therebetween in a direction substantially perpendicular to the direction in which the two lights are separated; a fifth means (33) for generating a difference signal or a summation signal of respective outputs of the lights received by the fourth means (29) in areas with the boundary line being interposed therebetween; and a sixth means (34) for obtaining a phase difference or an intensity difference of the difference signal or the summation signal to obtain a measurement value.
摘要:
A distance measurement system for modulating a light emitted from a light source (21), which emits a coherent light, into frequencies different from each other to measure an object under measurement, characterized in that it includes: a first means (23) for modulating the light emitted from the light source (21) into two lights which have frequencies different from each other and are irradiated separately adjacent to each other; a second means (26) for one-dimensionally or two-dimensionally scanning the two lights; a third means (31) for irradiating an object under measurement with the two lights which are two-dimensionally scanned; a fourth means (29) for receiving at least two or more divided reflected lights or transmitted lights from the object under measurement with a boundary line being interposed therebetween in a direction substantially perpendicular to the direction in which the two lights are separated; a fifth means (33) for generating a difference signal or a summation signal of respective outputs of the lights received by the fourth means (29) in areas with the boundary line being interposed therebetween; and a sixth means (34) for obtaining a phase difference or an intensity difference of the difference signal or the summation signal to obtain a measurement value.