发明公开
EP2823358A1 METHOD FOR REMOVING A HIGH DEFINITION NANOSTRUCTURE, A PARTLY FREESTANDING LAYER, A SENSOR COMPRISING SAID LAYER AND A METHOD USING SAID SENSOR
审中-公开
脱除高分辨率纳米结构的方法，部分分离层传感器，所述层和使用方法此类传感器
- 专利标题： METHOD FOR REMOVING A HIGH DEFINITION NANOSTRUCTURE, A PARTLY FREESTANDING LAYER, A SENSOR COMPRISING SAID LAYER AND A METHOD USING SAID SENSOR
- 专利标题（中）： 脱除高分辨率纳米结构的方法，部分分离层传感器，所述层和使用方法此类传感器
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申请号： EP13710624.1申请日： 2013-03-04
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公开(公告)号： EP2823358A1公开(公告)日： 2015-01-14
- 发明人: XU, Qiang , SCHNEIDER, Grégory , ZANDBERGEN, Henny , WU, Mengyue , SONG, Bo , DE HEER, Cornelius Dekker
- 申请人： Technische Universiteit Delft
- 申请人地址： Stevinweg 1 2628 CN Delft NL
- 专利权人： Technische Universiteit Delft
- 当前专利权人： Technische Universiteit Delft
- 当前专利权人地址： Stevinweg 1 2628 CN Delft NL
- 代理机构： Vogels, Leonard Johan Paul
- 优先权： NL2008412 20120305
- 国际公布： WO2013133700 20130912
- 主分类号： G03F7/00
- IPC分类号： G03F7/00 ; G03F7/20 ; G01N33/487 ; H01L29/16
摘要：
The present invention is in the field of a method for removing a high definition nanostructure in a partly free-standing layer, the layer, a sensor comprising said layer, a use of said sensor, and a method of detecting a species, and optional further characteristics thereof, using said sensor. The sensor and method are suited for detecting single ions, molecules, low concentrations thereof, and identifying sequences of base pairs, e.g. in a DNA-strand.
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