发明公开
- 专利标题: SYSTÈME DE MESURE D'UNE ZONE D'ÉCARTEMENT DANS UN SUBSTRAT
- 专利标题(英): System for measuring a zone of separation in a substrate
- 专利标题(中): 测量系统的分离区,在衬底
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申请号: EP13715306.0申请日: 2013-03-12
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公开(公告)号: EP2828635A1公开(公告)日: 2015-01-28
- 发明人: MAZEN, Frédéric , RIEUTORD, François , PENOT, Jean-Daniel , MONTMAYEUL, Philippe
- 申请人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 申请人地址: 25, rue Leblanc Bâtiment "Le Ponant D" 75015 Paris FR
- 专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人地址: 25, rue Leblanc Bâtiment "Le Ponant D" 75015 Paris FR
- 代理机构: Delorme, Nicolas
- 优先权: FR1252507 20120321
- 国际公布: WO2013140065 20130926
- 主分类号: G01N3/06
- IPC分类号: G01N3/06 ; G01B11/14
摘要:
The invention relates to a system for measuring a zone of separation in a substrate. This system (2) for measuring the propagation of a zone C of separation between a first portion (4) and a second portion (5) of at least one substrate (6) comprises: a module (10) for emitting at least two incident beams Fi each of which illuminates a separate point on the substrate (6), the at least two incident beams Fi being able to pass through the first portion (4) and the zone C of separation and meet the second portion (5) in such a way that each of them generates at least one first emergent beam Fe originating from the interface between the first portion (4) and the zone C of separation, and at least one second emergent beam Fe originating from the interface between the zone C of separation and the second portion (5); a detecting module (8) for detecting light intensity values resulting from interference between the first and second emergent beams Fe; and a computer (11) for determining the conditions of the propagation of the zone C of separation.
公开/授权文献
- EP2828635B1 SYSTÈME DE MESURE D'UNE ZONE D'ÉCARTEMENT DANS UN SUBSTRAT 公开/授权日:2018-05-30
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