Invention Publication
- Patent Title: SYSTÈME DE MESURE D'UNE ZONE D'ÉCARTEMENT DANS UN SUBSTRAT
- Patent Title (English): System for measuring a zone of separation in a substrate
- Patent Title (中): 测量系统的分离区,在衬底
-
Application No.: EP13715306.0Application Date: 2013-03-12
-
Publication No.: EP2828635A1Publication Date: 2015-01-28
- Inventor: MAZEN, Frédéric , RIEUTORD, François , PENOT, Jean-Daniel , MONTMAYEUL, Philippe
- Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Applicant Address: 25, rue Leblanc Bâtiment "Le Ponant D" 75015 Paris FR
- Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee Address: 25, rue Leblanc Bâtiment "Le Ponant D" 75015 Paris FR
- Agency: Delorme, Nicolas
- Priority: FR1252507 20120321
- International Announcement: WO2013140065 20130926
- Main IPC: G01N3/06
- IPC: G01N3/06 ; G01B11/14
Abstract:
The invention relates to a system for measuring a zone of separation in a substrate. This system (2) for measuring the propagation of a zone C of separation between a first portion (4) and a second portion (5) of at least one substrate (6) comprises: a module (10) for emitting at least two incident beams Fi each of which illuminates a separate point on the substrate (6), the at least two incident beams Fi being able to pass through the first portion (4) and the zone C of separation and meet the second portion (5) in such a way that each of them generates at least one first emergent beam Fe originating from the interface between the first portion (4) and the zone C of separation, and at least one second emergent beam Fe originating from the interface between the zone C of separation and the second portion (5); a detecting module (8) for detecting light intensity values resulting from interference between the first and second emergent beams Fe; and a computer (11) for determining the conditions of the propagation of the zone C of separation.
Public/Granted literature
- EP2828635B1 SYSTÈME DE MESURE D'UNE ZONE D'ÉCARTEMENT DANS UN SUBSTRAT Public/Granted day:2018-05-30
Information query