发明公开
EP2833550A1 COMPOSITE SUBSTRATE AND ELASTIC WAVE DEVICE
有权
VERBUNDSUBSTRAT UND ELASTISCHE WELLENVORRICHTUNG
- 专利标题: COMPOSITE SUBSTRATE AND ELASTIC WAVE DEVICE
- 专利标题(中): VERBUNDSUBSTRAT UND ELASTISCHE WELLENVORRICHTUNG
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申请号: EP14774484.1申请日: 2014-03-04
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公开(公告)号: EP2833550A1公开(公告)日: 2015-02-04
- 发明人: HORI, Yuji , TAI, Tomoyoshi
- 申请人: NGK Insulators, Ltd.
- 申请人地址: 2-56, Suda-cho, Mizuho-ku Nagoya-city, Aichi 467-8530 JP
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: 2-56, Suda-cho, Mizuho-ku Nagoya-city, Aichi 467-8530 JP
- 代理机构: TBK
- 优先权: JP2013066319 20130327
- 国际公布: WO2014156507 20141002
- 主分类号: H03H9/25
- IPC分类号: H03H9/25 ; H03H9/145
摘要:
A composite substrate 10 is a substrate formed by bonding a piezoelectric substrate 12 and a support substrate 14 having a coefficient of thermal expansion lower than that of the piezoelectric substrate 12. The support substrate 14 has a first surface 14a bonded to the piezoelectric substrate 12 and a second surface 14b opposite to the first surface 14a. The coefficient of thermal expansion of the support substrate 14 is decreased along a thickness direction from the second surface 14b to an intermediate position 14c located between the first surface 14a and the second surface 14b.
公开/授权文献
- EP2833550B1 COMPOSITE SUBSTRATE AND ELASTIC WAVE DEVICE 公开/授权日:2017-05-10
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