发明公开
EP2833550A1 COMPOSITE SUBSTRATE AND ELASTIC WAVE DEVICE 有权
VERBUNDSUBSTRAT UND ELASTISCHE WELLENVORRICHTUNG

  • 专利标题: COMPOSITE SUBSTRATE AND ELASTIC WAVE DEVICE
  • 专利标题(中): VERBUNDSUBSTRAT UND ELASTISCHE WELLENVORRICHTUNG
  • 申请号: EP14774484.1
    申请日: 2014-03-04
  • 公开(公告)号: EP2833550A1
    公开(公告)日: 2015-02-04
  • 发明人: HORI, YujiTAI, Tomoyoshi
  • 申请人: NGK Insulators, Ltd.
  • 申请人地址: 2-56, Suda-cho, Mizuho-ku Nagoya-city, Aichi 467-8530 JP
  • 专利权人: NGK Insulators, Ltd.
  • 当前专利权人: NGK Insulators, Ltd.
  • 当前专利权人地址: 2-56, Suda-cho, Mizuho-ku Nagoya-city, Aichi 467-8530 JP
  • 代理机构: TBK
  • 优先权: JP2013066319 20130327
  • 国际公布: WO2014156507 20141002
  • 主分类号: H03H9/25
  • IPC分类号: H03H9/25 H03H9/145
COMPOSITE SUBSTRATE AND ELASTIC WAVE DEVICE
摘要:
A composite substrate 10 is a substrate formed by bonding a piezoelectric substrate 12 and a support substrate 14 having a coefficient of thermal expansion lower than that of the piezoelectric substrate 12. The support substrate 14 has a first surface 14a bonded to the piezoelectric substrate 12 and a second surface 14b opposite to the first surface 14a. The coefficient of thermal expansion of the support substrate 14 is decreased along a thickness direction from the second surface 14b to an intermediate position 14c located between the first surface 14a and the second surface 14b.
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