发明公开
- 专利标题: Cavity package with pre-molded substrate
- 专利标题(中): 带预成型基材的腔体包装
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申请号: EP14182490.4申请日: 2014-08-27
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公开(公告)号: EP2843698A3公开(公告)日: 2015-04-01
- 发明人: Fan, Chun Ho
- 申请人: Ubotic Company Limited
- 申请人地址: Rm 18, 15/F, International Trade Centre 11-19 Sha Tsui Road Tsuen Wan, Hong Kong CN
- 专利权人: Ubotic Company Limited
- 当前专利权人: Ubotic Company Limited
- 当前专利权人地址: Rm 18, 15/F, International Trade Centre 11-19 Sha Tsui Road Tsuen Wan, Hong Kong CN
- 代理机构: ABG Patentes, S.L.
- 优先权: US201361870352P 20130827
- 主分类号: H01L23/047
- IPC分类号: H01L23/047 ; H01L23/10 ; H01L23/043 ; H01L23/498 ; H01L21/48
摘要:
A cavity package is set forth along with a method of manufacturing thereof. The method comprises applying a selective plating resist to a metallic substrate in a pattern to expose portions for a ring, tie bars, die attach pad and input/output wire bonding pads; elective depositing of metal plating using the selective plating resist; removing the selective metal plating resist; applying a selective etching resist to the substrate; selectively etching portions of the substrate not covered by the selective etching resist; stripping away the selective etching resist; pre-molding a leadframe to the substrate so as to surround the die attach pad portion; etching the tie bars away from the bottom surface of the substrate; attaching a semiconductor device die to the die attach pad; wire bonding the semiconductor device to the input/output wire bonding pads; and attaching a cap to the ring portion of the substrate and the die attach pad to protect the wire bonded semiconductor device die and permit electrical grounding.
公开/授权文献
- EP2843698A2 Cavity package with pre-molded substrate 公开/授权日:2015-03-04
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