发明公开
EP2851451A1 Amorphous-carbon-containing film 审中-公开
Beschichtung mit amorphem Kohlenstoff

Amorphous-carbon-containing film
摘要:
Provided is an amorphous-carbon-containing film that has high levels of hardness and substrate bonding strength, is capable of greatly extending the longevity of machining tools and machine parts, and exhibits an extremely high level of practical usefulness. The present invention provides an amorphous-carbon-containing film formed upon a substrate, wherein the film is constituted by an amorphous carbon film layer [A] and an amorphous carbon film layer [B] that measure at least 0.05 µm in thickness and being layered so that the amorphous carbon film layer [A] is disposed nearer the substrate and the amorphous carbon film layer [B] is disposed nearer the surface, the overall thickness of the amorphous-carbon-containing film is at least 0.1 µm and no more than 1.5 µm, and the amorphous carbon film layer [A] and the amorphous carbon film layer [B] have predetermined properties.
公开/授权文献
信息查询
0/0