发明公开
- 专利标题: Amorphous-carbon-containing film
- 专利标题(中): Beschichtung mit amorphem Kohlenstoff
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申请号: EP14185029.7申请日: 2014-09-16
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公开(公告)号: EP2851451A1公开(公告)日: 2015-03-25
- 发明人: Suwa, Koji , Hirosa, Keita , Sato, Akira , Watanabe, Yuji
- 申请人: UNION TOOL CO.
- 申请人地址: 17-1, Minami-Ohi 6 Shinagawa Tokyo JP
- 专利权人: UNION TOOL CO.
- 当前专利权人: UNION TOOL CO.
- 当前专利权人地址: 17-1, Minami-Ohi 6 Shinagawa Tokyo JP
- 代理机构: Kramer Barske Schmidtchen Patentanwälte PartG mbB
- 优先权: JP2013196793 20130924
- 主分类号: C23C14/32
- IPC分类号: C23C14/32 ; C23C14/06 ; C23C14/02 ; C23C28/04 ; C23C28/00
摘要:
Provided is an amorphous-carbon-containing film that has high levels of hardness and substrate bonding strength, is capable of greatly extending the longevity of machining tools and machine parts, and exhibits an extremely high level of practical usefulness. The present invention provides an amorphous-carbon-containing film formed upon a substrate, wherein the film is constituted by an amorphous carbon film layer [A] and an amorphous carbon film layer [B] that measure at least 0.05 µm in thickness and being layered so that the amorphous carbon film layer [A] is disposed nearer the substrate and the amorphous carbon film layer [B] is disposed nearer the surface, the overall thickness of the amorphous-carbon-containing film is at least 0.1 µm and no more than 1.5 µm, and the amorphous carbon film layer [A] and the amorphous carbon film layer [B] have predetermined properties.
公开/授权文献
- EP2851451B1 Amorphous-carbon-containing film 公开/授权日:2018-12-26
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