公开(公告)号：EP2851451A1

公开(公告)日：2015-03-25

申请号：EP14185029.7

申请日：2014-09-16

申请人： UNION TOOL CO.

发明人： Suwa, Koji ,  Hirosa, Keita ,  Sato, Akira ,  Watanabe, Yuji

IPC分类号： C23C14/32 ,  C23C14/06 ,  C23C14/02 ,  C23C28/04 ,  C23C28/00

CPC分类号： C23C14/325 ,  C23C14/025 ,  C23C14/0605 ,  C23C28/046 ,  C23C28/048 ,  C23C28/322 ,  C23C28/343 ,  C23C28/36 ,  C23C28/44

摘要： Provided is an amorphous-carbon-containing film that has high levels of hardness and substrate bonding strength, is capable of greatly extending the longevity of machining tools and machine parts, and exhibits an extremely high level of practical usefulness. The present invention provides an amorphous-carbon-containing film formed upon a substrate, wherein the film is constituted by an amorphous carbon film layer [A] and an amorphous carbon film layer [B] that measure at least 0.05 µm in thickness and being layered so that the amorphous carbon film layer [A] is disposed nearer the substrate and the amorphous carbon film layer [B] is disposed nearer the surface, the overall thickness of the amorphous-carbon-containing film is at least 0.1 µm and no more than 1.5 µm, and the amorphous carbon film layer [A] and the amorphous carbon film layer [B] have predetermined properties.

摘要翻译： 提供了具有高水平的硬度和基板粘合强度的非晶碳含量膜，能够大大延长机加工工具和机器部件的使用寿命，并具有极高的实用性。 本发明提供了一种形成在基材上的含非晶碳膜，其中该膜由无定形碳膜层[A]和无定形碳膜层[B]构成，其厚度至少为0.05μm并且层叠 使得非晶碳膜层[A]设置在更靠近基板的位置，非晶碳膜层[B]设置在更靠近表面的地方，无定形碳膜的总厚度至少为0.1μm，不大于 1.5μm，无定形碳膜层[A]和无定形碳膜层[B]具有预定的性能。