发明公开
- 专利标题： ROTATING VACUUM CHAMBER COUPLING ASSEMBLY
- 专利标题（中）： 离合器总成用于旋转真空室
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申请号： EP14721591.7申请日： 2014-03-11
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公开(公告)号： EP2973642A1公开(公告)日： 2016-01-20
- 发明人: FOWLER, Richard, J. , DRORY, Michael, D.
- 申请人： The Timken Company
- 申请人地址： 1835 Dueber Avenue S.W. Canton, OH 44706-2798 US
- 专利权人： The Timken Company
- 当前专利权人： The Timken Company
- 当前专利权人地址： 1835 Dueber Avenue S.W. Canton, OH 44706-2798 US
- 代理机构： Marles, Alan David
- 优先权： US201361781192P 20130314
- 国际公布： WO2014159367 20141002
- 主分类号： H01J37/32
- IPC分类号： H01J37/32
摘要：
A coupling (30) for the introduction of a bias voltage into a vacuum chamber. The coupling consists of a metallic ball bearing assembly (36), a bearing sleeve or cup (34), and an EMI shielding gasket (42) seated within the bearing sleeve or cup. The ball bearing assembly is fitted within the EMI shielding gasket, about a metallic shaft (32) which, in turn, is coupled to a source of the bias voltage. The bearing sleeve or cup is, in turn, coupled to a rotating component such as a platen, for receiving the bias voltage within the vacuum chamber.
公开/授权文献
- EP2973642B1 ROTATING VACUUM CHAMBER COUPLING ASSEMBLY 公开/授权日：2019-05-08
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